Semiconductor device and method of manufacturing semiconductor device
In a first main surface of a silicon carbide semiconductor base, a trench is formed. On a first main surface side of the silicon carbide semiconductor base, an n-type silicon carbide epitaxial layer is deposited. In a surface of the n-type silicon carbide epitaxial layer, an n-type high-concentration region is provided. In the surface of the n-type silicon carbide epitaxial layer, a first p-type base region and a second p + -type base region are selectively provided. The second p + -type base region is formed at the bottom of the trench. A depth of the n-type high-concentration region is deeper than that of the first p-type base region and the second p + -type base region. Thus, by an easy method, the electric field at a gate insulating film at the bottom of the trench is mitigated, enabling the breakdown voltage of the active region to be maintained and the ON resistance to be lowered.
1. A semiconductor device comprising:
a wide bandgap semiconductor substrate of a first conductivity type and containing a semiconductor material having a bandgap wider than a bandgap of silicon;
a wide bandgap semiconductor layer of the first conductivity type formed on a front surface of the wide bandgap semiconductor substrate, an impurity concentration of the wide bandgap semiconductor layer of the first conductivity type being lower than an impurity concentration of the wide bandgap semiconductor substrate;
a first base region of a second conductivity type selectively formed in a surface layer on a side of the wide bandgap semiconductor layer of the first conductivity type, opposite a wide bandgap semiconductor substrate side;
a second base region of the second conductivity type selectively formed in the wide bandgap semiconductor layer of the first conductivity type;
a region of the first conductivity type selectively formed in a surface layer on the side of the wide bandgap semiconductor layer of the first conductivity type, opposite the wide bandgap semiconductor substrate side, an impurity concentration of the region of the first conductivity type being higher than the impurity concentration of the wide bandgap semiconductor layer of the first conductivity type;
a wide bandgap semiconductor layer of the second conductivity type formed on a surface of the wide bandgap semiconductor layer of the first conductivity type, on the side of the wide bandgap semiconductor layer of the first conductivity type, opposite the wide bandgap semiconductor substrate side, the wide bandgap semiconductor layer of the second conductivity type containing a semiconductor material having a bandgap wider than the bandgap of silicon;
a source region of the first conductivity type selectively formed in the wide bandgap semiconductor layer of the second conductivity type;
a trench penetrating the wide bandgap semiconductor layer of the second conductivity type and reaching the region of the first conductivity type, the trench contacting the second base region;
a gate electrode formed in the trench via a gate insulating film;
an interlayer insulating film formed on the gate electrode;
a source electrode in contact with the wide bandgap semiconductor layer of the second conductivity type and the source region of the first conductivity; and
a drain electrode provided on a rear surface of the wide bandgap semiconductor substrate of the first conductivity type, wherein
a depth of the region of the first conductivity type is deeper than a depth of the first base region of the second conductivity type and the second base region of the second conductivity type, and
a width of the second base region is the same or greater than a width of the trench.
2. The semiconductor device according to claim 1 , wherein the depth of the region of the first conductivity type is deeper than the depth of the first base region of the second conductivity type and the second base region of the second conductivity type by 0.2 μm to 0.5 μm.
3. The semiconductor device according to claim 1 , wherein the semiconductor material having a bandgap wider than the bandgap of silicon is silicon carbide.
4. The semiconductor device according to claim 1 wherein a part of the first base region of the second conductivity type is connected to the second base region of the second conductivity type.
5. The semiconductor device according to claim 1 , further comprising a contact region of the second conductivity type, selectively formed in the wide bandgap semiconductor layer of the second conductivity type, wherein
the wide bandgap semiconductor layer of the second conductivity type is disposed between the contact region and the first base region so that the contact region is free of direct contact with the first base region.