IP Library › Granted Patent US 10,283,611
Granted Patent B2
US 10,283,611 · App. 15/658,736 · Granted May 7, 2019

Electronic device including topological insulator and transition metal oxide

Inventors: MannHo Cho (Seoul, KR); KwangSik Jeong (Seoul, KR); DaeHong Ko (Goyang-si, KR); DongHyeok Lim (Paju-si, KR); TaeHyeon Kim (Hwaseong-si, KR)
Assignee: Industry-Academic Cooperation Foundation, Yonsei University
H01L29/517H01L29/41758H01L29/42364H01L29/511
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Quick Facts
Patent No.
US 10,283,611
App. No.
15/658,736
Granted
May 7, 2019
Kind
B2
Abstract

An electronic device may include a topological insulating layer including first and second surfaces facing each other and a transition metal oxide layer provided on the first surface of the topological insulating layer. The topological insulating layer may have a thickness ranging from 1 nm to 10 nm.

Claims (38)

1. An electronic device, comprising:

a topological insulating layer including first and second surfaces facing each other; and

a transition metal oxide layer provided on the first surface of the topological insulating layer,

wherein the transition metal oxide layer comprises a first sub-oxide layer and a second sub-oxide layer, the first sub-oxide layer being positioned between the topological insulating layer and the second sub-oxide layer, and

wherein a density of oxygen vacancies in the second sub-oxide layer is greater than a density of oxygen vacancies in the first sub-oxide layer.

2. The electronic device of claim 1 , wherein the topological insulating layer has a thickness ranging from 1 nm to 10 nm.

3. The electronic device of claim 1 , wherein the topological insulating layer contains a compound represented by a chemical formula A X B Y C Z D W , where 0<X≤10, 0<Y≤10, 0<Z≤10, and 0<W≤10,

wherein each of A and B is Bi, Sb, Ti, Pb, Sn, In, Ga, or Ge, and

each of C and D is Se, Te, or S.

4. The electronic device of claim 1 , wherein the transition metal oxide layer is in contact with the first surface.

5. The electronic device of claim 1 , further comprising: a gate electrode provided on the transition metal oxide layer,

wherein the gate electrode is configured to apply a voltage to the transition metal oxide layer.

6. The electronic device of claim 5 , wherein a density of oxygen vacancies in the transition metal oxide layer is controlled by the voltage.

7. The electronic device of claim 5 , wherein a charge state of oxygen vacancies in the transition metal oxide layer is controlled by the voltage.

8. The electronic device of claim 1 , further comprising: first and second source/drain electrodes provided on the second surface;

wherein the second surface comprises a portion that is located between the first and second source/drain electrodes and is used as a channel region; and

the transition metal oxide layer is overlapped with at least a portion of the channel region, when viewed in a plan view.

9. The electronic device of claim 1 , further comprising: first and second source/drain electrodes provided on the first surface,

wherein the first and second source/drain electrodes are spaced apart from each other with the transition metal oxide layer interposed therebetween.

10. An electronic device, comprising:

a topological insulating layer having a surface, a portion of which is used as a channel region;

a transition metal oxide layer overlapped with the channel region, when viewed in a plan view; and

a gate electrode provided on the transition metal oxide layer,

wherein the gate electrode is configured to apply a voltage to the transition metal oxide layer,

wherein the transition metal oxide layer comprises a first sub-oxide layer and a second sub-oxide layer, the first sub-oxide layer being positioned between the topological insulating layer and the second sub-oxide layer, and

wherein a density of oxygen vacancies in the second sub-oxide layer is greater than a density of oxygen vacancies in the first sub-oxide layer.

11. The electronic device of claim 10 , wherein the topological insulating layer has a thickness ranging from 1 nm to 10 nm.

12. The electronic device of claim 10 , wherein resistance of the channel region is controlled by the voltage.

13. The electronic device of claim 12 , wherein a density of oxygen vacancies in the transition metal oxide layer is controlled by the voltage.

14. The electronic device of claim 12 , wherein a charge state of oxygen vacancies in the transition metal oxide layer is controlled by the voltage.

15. An electronic device, comprising:

a topological insulating layer including first and second surfaces facing each other; and

a transition metal oxide layer provided on the first surface of the topological insulating layer,

wherein the transition metal oxide layer comprises a first sub-oxide layer and a second sub-oxide layer, the second sub-oxide layer being positioned between the topological insulating layer and the first sub-oxide layer, and

wherein a density of oxygen vacancies in the second sub-oxide layer is greater than a density of oxygen vacancies in the first sub-oxide layer.

16. The electronic device of claim 15 , wherein the transition metal oxide layer is in contact with the first surface.

17. The electronic device of claim 15 , further comprising: a gate electrode provided on the transition metal oxide layer,

wherein the gate electrode is configured to apply a voltage to the transition metal oxide layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 25, 2017
From: CHO, MANNHO; JEONG, KWANGSIK; KO, DAEHONG; LIM, DONGHYEOK; KIM, TAEHYEON
To: INDUSTRY-ACADEMIC COOPERATION FOUNDATION, YONSEI UNIVERSITY
Reel/Frame 043092/0907 →
Priority Claims (3)
KR 10-2016-0123915 · Sep 27, 2016 · national
KR 10-2016-0129662 · Oct 7, 2016 · national
KR 10-2017-0043179 · Apr 3, 2017 · national
Continuity (1)
Related Publication 20180090592A1 · Mar 29, 2018