IP Library Granted Patent US 10,287,677
Granted Patent B2
US 10,287,677 · App. 14/443,300 · Granted May 14, 2019

Methods of fabricating pillared graphene nanostructures

Inventors: Cengiz S. Ozkan (San Diego, CA); Mihrimah Ozkan (San Diego, CA); Ali B. Guvenc (San Diego, CA); Rajat K. Paul (San Diego, CA); Jian Lin (San Diego, CA); Maziar Ghazinejad (San Diego, CA); Miro Penchev (San Diego, CA); Shirui Guo (San Diego, CA); Jiebin Zhong (San Diego, CA)
Assignee: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
C23C16/44B82Y10/00B82Y20/00B82Y40/00C01B32/186C23C16/26H01G4/008H01G9/042H01G9/145H01G9/20H01G9/2031H01G9/2072H01G11/36H01G11/52H01L21/0262H01L21/02491H01L21/02527H01L21/02664H01L27/302H01L29/0673H01L29/1606H01L29/413H01L29/7781H01L31/028H01L31/068H01L31/076H01L31/1804C01B2204/04C01B2204/22H01L51/0048H01L51/424Y02E10/542Y02E10/547Y02E10/548Y02E60/13Y02P70/521
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,287,677
App. No.
14/443,300
Granted
May 14, 2019
Kind
B2
Abstract

Methods of fabricating a graphene film are disclosed. An example method can include providing a substrate, heating the substrate between about 600° C. and about 1100° C. in a chamber, and introducing a carbon source into the chamber at a temperature between about 600° C. and about 1100° C. for about 10 seconds to about 1 minute. The method can further include cooling the substrate to about room temperature to form the graphene film Methods of fabricating pillared graphene nano structures and graphene based devices are also provided.

Claims (21)

1. A method of fabricating a pillared graphene nanostructure comprising carbon nanotubes on a graphene film, the method comprising:

providing a substrate;

depositing a block copolymer on the substrate, wherein the block copolymer comprises a matrix of major polymer block, and cylinders of minor polymer block within the matrix;

subsequently loading a catalyst into the cylinders of the minor polymer block wherein the minor polymer block absorbs catalytic ions to form a loaded block copolymer having a patterned array of catalyst nanoparticles;

introducing the loaded block copolymer into a heated atmosphere of Ar+H 2 ;

introducing a carbon source into the heated atmosphere of Ar+H 2 to form the pillared graphene nanostructure; and

cooling the pillared graphene nanostructure.

2. The method of claim 1 , wherein depositing the block copolymer comprises:

dissolving the block copolymer to form a polymer solution;

spin coating the solution onto the substrate; and

solvent annealing the spin coated solution.

3. The method of claim 1 , wherein the catalyst comprises ions of a transition metal.

4. The method of claim 1 , wherein loading the catalyst into the block copolymer comprises introducing the copolymer into a solution of the catalyst in salt form.

5. The method of claim 1 , wherein before introducing the loaded block copolymer into the heated atmosphere, the method further comprising:

removing the loaded block copolymer from the substrate; and

transferring the loaded block copolymer to a different substrate.

6. The method of claim 5 , wherein the different substrate comprises a deposited metal layer.

7. The method of claim 1 , wherein the heated atmosphere is between about 600° C. and about 1100° C.

8. The method of claim 1 , wherein the carbon source is introduced for about 5 minutes to about 30 minutes.

9. The method of claim 1 , wherein the carbon source is C 2 H 2 or CH 4 .

10. The method of claim 1 , further comprising controlling the size and separation of the carbon nanotubes by controlling the size and separation of the catalyst.

Continuity (2)
Provisional Application 61728147 · Nov 19, 2012
Related Publication 20150299852A1 · Oct 22, 2015
Cited By (2)
US 12,221,346 US 12,698,560