Micro-nozzle array
The invention relates to a micro-nozzle array comprising a plurality of capillaries comprising a first silica-based material and a second silica-based material substantially surrounding the first silica-based material of the plurality of capillaries, and a plurality of nozzles extending beyond a face of the micro-nozzle array, each nozzle corresponding to a single capillary, wherein each nozzle comprises the first silica-based material. The micro-nozzle array may be used in hydrodynamic or electro-osmotic applications. In one embodiment the micro-nozzle array is a multiple electrospray emitter. The invention also relates to methods for preparing and using micro-nozzle arrays.
1. A micro-nozzle array, comprising:
a plurality of capillaries, each capillary comprising a first silica-based material;
a second silica-based material, different from the first silica based material, substantially surrounding and contacting the first silica-based material of the plurality of capillaries and filling between the plurality of capillaries;
a plurality of micro-nozzles extending beyond a face of the micro-nozzle array, each micro-nozzle corresponding to a single capillary;
wherein each micro-nozzle comprises the first silica-based material;
wherein the face of the micro-nozzle array comprises the second silica-based material.
2. The micro-nozzle array of claim 1 , wherein the micro-nozzles and/or the face of the micro-nozzle array further comprises a treatment or a coating applied thereto.
3. The micro-nozzle array of claim 1 , wherein at least one of the first silica-based material and the second silica-based material is doped.
4. The micro-nozzle array of claim 1 , wherein the first silica-based material is substantially pure silica.
5. The micro-nozzle array of claim 1 , wherein the second silica-based material is boron doped silica.
6. The micro-nozzle array of claim 1 , used in a hydrodynamic application.
7. The micro-nozzle array of claim 1 , used in an electro-osmotic application.
8. A hydrodynamic or electro-osmotic device comprising the micro-nozzle array of claim 1 .
9. A MES emitter comprising the micro-nozzle array of claim 1 .
10. A method of preparing a micro-nozzle array, comprising:
micro-machining a MSF comprising:
a plurality of capillaries, each capillary comprising a first silica-based material; and
a second silica-based material, different from the first silica based material, substantially surrounding and contacting the first silica-based material of the plurality of capillaries and filling between the plurality of capillaries;
wherein the micro-machining produces a plurality of micro-nozzles extending beyond a face of the array, each micro-nozzle corresponding to a single capillary;
wherein each micro-nozzle comprises the first silica-based material;
wherein the face of the micro-nozzle array comprises the second silica-based material.
11. The method of claim 10 , further comprising applying a treatment or a coating to the micro-nozzles and/or the face of the array.
12. The method of claim 10 , wherein at least one of the first silica-based material and the second silica-based material is doped.
13. The method of claim 10 , wherein the first silica-based material is substantially pure silica.
14. The method of claim 10 , wherein the second silica-based material is boron doped silica.
15. The method of claim 10 , wherein micro-machining comprises chemical etching the face of the MSF.
16. A method comprising using the micro-nozzle array of claim 1 in a hydrodynamic application.
17. A method comprising using the micro-nozzle array of claim 1 in an electro-osmotic application.
18. A method comprising using the micro-nozzle array of claim 1 as a MES emitter.