Acoustic wave device and method for manufacturing the same
An acoustic wave device includes: a substrate; an acoustic wave generating part disposed on a surface of the substrate; a ground pad disposed on the surface of the substrate; a support part spaced apart from the acoustic wave generating part on the surface of the substrate; a shielding member disposed on the support part, and spaced apart from the acoustic wave generating part; and a ground terminal disposed on the ground pad, wherein the ground pad and the shielding member are electrically connected to each other through the ground terminal.
1. An acoustic wave device comprising:
a substrate;
an acoustic wave generating part disposed on a surface of the substrate;
a ground pad disposed on the surface of the substrate;
a support part spaced apart from the acoustic wave generating part on the surface of the substrate;
a shielding member disposed on the support part, and spaced apart from the acoustic wave generating part; and
a ground terminal disposed on the ground pad and connecting the ground pad to the shielding member,
wherein the ground terminal and the ground pad are electrically connected to each other in the support part.
2. The acoustic wave device of claim 1 , wherein the support part is disposed between the ground pad and the shielding member.
3. The acoustic wave device of claim 1 , wherein the ground terminal comprises a solder bump or a solder ball.
4. The acoustic wave device of claim 1 , wherein the ground terminal comprises:
a connection conductor disposed on the ground pad in pillar form; and
a terminal part disposed at an end of the connection conductor.
5. The acoustic wave device of claim 4 , wherein the shielding member is bonded to the connection conductor.
6. The acoustic wave device of claim 1 , further comprising a sealing part disposed along surfaces of the shielding member and the support part.
7. The acoustic wave device of claim 6 , wherein:
the shielding member comprises a portion exposed externally of the sealing part; and
the ground terminal is bonded to the portion exposed externally of the sealing part.
8. The acoustic wave device of claim 1 , wherein:
the shielding member comprises a ring-shaped connection part having a through-hole; and
the ground terminal is received in the through-hole, and is electrically connected to the connection part.
9. A method to manufacture an acoustic wave device, the method comprising:
forming an acoustic wave generating part on a surface of a substrate;
forming a ground pad on the surface of the substrate;
forming a support part to be spaced apart from the acoustic wave generating part on the surface of the substrate;
disposing a shielding member on the support part; and
forming a ground terminal on the ground pad to connect the ground pad to the shielding member, and to be electrically connected to the ground pad in the support part.
10. The method of claim 9 , wherein the forming of the support part comprises disposing the support part partially on the ground pad such that a portion of the ground pad is exposed externally of the support part.
11. The method of claim 9 , further comprising, after the disposing of the shielding member on the support part, forming a sealing part along surfaces of the shielding member and the support part.
12. The method of claim 11 , wherein:
the forming of the sealing part comprises removing a portion of the sealing part to expose a portion of the shielding member externally of the sealing part; and
the ground terminal is attached to the portion of the shielding member.
13. The method of claim 9 , wherein the forming of the shielding member comprises forming the shielding member such that a portion of the shielding member protrudes externally of the support part over the ground pad.
14. The method of claim 9 , wherein the forming of the ground terminal comprises:
disposing a conductive member on the ground pad; and
melting and curing the conductive member.
15. The method of claim 9 , wherein the forming of the ground terminal comprises:
disposing a connection conductor having a pillar form on the ground pad; and
forming a terminal part at an end of the connection conductor.
16. A method to manufacture an acoustic wave device, the method comprising:
forming an acoustic wave generating part on a surface of a substrate;
forming a ground pad on the surface of the substrate;
forming a connection conductor having a pillar form on the ground pad;
forming a support part to be spaced apart from the acoustic wave generating part on the surface of the substrate;
disposing a shielding member on the support part and connecting the shielding member to the connection conductor; and
forming a terminal part at an end of the connection conductor.
17. The method of claim 16 , wherein the disposing of the shielding member on the support part comprises positioning the shielding member to be spaced apart from the acoustic wave generating part in a direction perpendicular to the surface of the substrate.
18. An acoustic wave device comprising:
a substrate;
an acoustic wave generating part disposed on a surface of the substrate;
a ground pad disposed on the surface;
a support part spaced apart from the acoustic wave generating part on the surface;
a shielding member disposed on the support part, and spaced apart from the acoustic wave generating part; and
a ground terminal disposed on the ground pad, penetrating through the shielding member, and connecting the ground pad to the shielding member.