Electrofluidic support plates and preparation method therefor, and electrofluidic apparatus
Disclosed is an electrofluidic support plate and a method for preparing the same, and an electrofluidic device comprising the support plate. The method comprises the following steps of: providing a substrate which has a surface provided with an electrode layer; arranging a first amorphous fluoropolymer layer on the surface of the substrate, and carrying out hydrophilic modification on a surface of the amorphous fluoropolymer layer; arranging pixel walls on the amorphous fluoropolymer layer after hydrophilic modification; arranging a second amorphous fluoropolymer layer which is a hydrophobic layer; the second amorphous fluoropolymer layer covering all surfaces of the pixel walls and a groove area encircled by the pixel walls; filling the groove area encircled by the pixel walls with a protective material; removing the second amorphous fluoropolymer layer not covered by the protective material and on a top of the pixel walls; and removing the protective material.
1. A method for preparing an electrofluidic support plate, comprising the following steps of:
1) providing a substrate which has a surface provided with an electrode layer;
2) arranging a first amorphous fluoropolymer layer on the surface of the substrate, and carrying out hydrophilic modification on a surface of the first amorphous fluoropolymer layer;
3) arranging pixel walls on the amorphous fluoropolymer layer after the hydrophilic modification;
4) arranging a second amorphous fluoropolymer layer which is a hydrophobic layer; the second amorphous fluoropolymer layer covering all surfaces of the pixel walls and a groove area encircled by the pixel walls;
5) filling the groove area encircled by the pixel walls with a protective material;
6) removing the second amorphous fluoropolymer layer not covered by the protective material and on a top of the pixel walls; and
7) removing the protective material.
2. The method for preparing an electrofluidic support plate according to claim 1 , wherein the first amorphous fluoropolymer layer and the second amorphous fluoropolymer layer obtained in the step 2) and the step 4) are formed by Dupont Teflon AF series, Solvay Hyflon series or Asahi Glass Cytop series.
3. The method for preparing an electrofluidic support plate according to claim 1 , wherein a total thickness of the first amorphous fluoropolymer layer and the second amorphous fluoropolymer layer obtained in the step 2) and the step 4) is 100 nm-2000 nm.
4. The method for preparing an electrofluidic support plate according to claim 3 , wherein the total thickness of the first amorphous fluoropolymer layer and the second amorphous fluoropolymer layer is 300 nm-1200 nm.
5. The method for preparing an electrofluidic support plate according to claim 1 , wherein a thickness of the pixel walls obtained in the step 3) is greater than or equal to 2 μm.
6. The method for preparing an electrofluidic support plate according to claim 1 , wherein the protective material in the step 5) is photoresist.
7. The method for preparing an electrofluidic support plate according to claim 1 , wherein, in the step 5), the protective material is filled by any one of: dip-coating, slit-coating, screen printing, spray-coating, spin-coating or blade-coating.
8. The method for preparing an electrofluidic support plate according to claim 1 , wherein a thickness of the pixel walls obtained in the step 6) is 2-20 μm.
9. An electrofluidic support plate prepared by the method according to claim 1 .
10. An electrofluidic device, comprising the electrofluidic support plate according to claim 9 .