Salicide bottom contacts
A method of forming a contact to a semiconductor device that includes forming a vertically orientated channel region on semiconductor material layer of a substrate; and forming a first source/drain region in the semiconductor material layer. The method may continue with forming a metal semiconductor alloy contact on the first source/drain region extending along a horizontally orientated upper surface of the first source/drain region that is substantially perpendicular to the vertically orientated channel region, wherein the metal semiconductor alloy contact extends substantially to an interface with the vertically orientated channel region. Thereafter, a gate structure is formed on the vertically orientated channel region, and a second source/drain region is formed on the vertically orientated channel region.
1. A vertical transistor comprising:
a vertically orientated channel region on semiconductor material layer of a substrate;
a first source/drain region in the semiconductor material layer;
a metal semiconductor alloy contact on the first source/drain region extending along a horizontally orientated upper surface of the first source/drain region, wherein the metal semiconductor alloy contact extends substantially to an interface with the vertically orientated channel region, wherein an edge of the metal semiconductor alloy contact is aligned with a sidewall of the vertically orientated channel region;
a gate structure on the vertically orientated channel region; and
a second source/drain region on the vertically orientated channel region.
2. The vertical transistor of claim 1 , wherein the vertical transistor is a p-type semiconductor device, and the metal semiconductor alloy contact is of a composition selected from the group consisting of titanium nickel silicide, titanium platinum silicide, titanium nickel germanide, titanium platinum germanide, and combinations thereof.
3. The vertical transistor of claim 2 , wherein the vertical transistor is an n-type semiconductor device, and the metal semiconductor alloy contact is comprised of nickel silicide.
4. The vertical transistor of claim 3 , wherein metal semiconductor alloy is doped with phosphorus, arsenic or a combination thereof.
5. The vertical transistor of claim 2 , wherein the metal semiconductor alloy is doped with boron, gallium or a combination thereof.
6. The vertical transistor of claim 1 , wherein the metal semiconductor alloy has a thickness ranging from about 2 nm to about 50 nm.
7. The vertical transistor of claim 1 , further comprising strapped via contacts to the metal semiconductor alloy contact.
8. A vertical transistor comprising:
a vertically orientated channel region on semiconductor material layer of a substrate;
a metal semiconductor alloy contact on a first source/drain region extending along a horizontally orientated upper surface of the first source/drain region to an interface with the vertically orientated channel region;
an edge of the metal semiconductor alloy contact aligned with a sidewall of the vertically orientated channel region;
a gate structure on the vertically orientated channel region; and
a second source/drain region on the vertically orientated channel region.
9. The vertical transistor of claim 8 , wherein the vertical transistor is a p-type semiconductor device, and the metal semiconductor alloy contact is of a composition selected from the group consisting of titanium nickel silicide, titanium platinum silicide, titanium nickel germanide, titanium platinum germanide, and combinations thereof.
10. The vertical transistor of claim 9 , wherein the vertical transistor is an n-type semiconductor device, and the metal semiconductor alloy contact is comprised of nickel silicide.
11. The vertical transistor of claim 10 , wherein metal semiconductor alloy is doped with phosphorus, arsenic or a combination thereof.
12. The vertical transistor of claim 9 , wherein the metal semiconductor alloy is doped with boron, gallium or a combination thereof.
13. The vertical transistor of claim 8 , wherein the metal semiconductor alloy has a thickness ranging from about 2 nm to about 50 nm.
14. The vertical transistor of claim 8 , further comprising strapped via contacts to the metal semiconductor alloy contact.