Display substrate and manufacturing method thereof, and flexible display device having display substrate
The present invention provides a display substrate and a manufacturing method thereof, and a flexible display device having the display substrate, which belong to the field of display technology, and can solve the problem of poor reliability of display substrates due to the damage to thin film transistors when the existing display substrates are bent. In the display substrate provided by the present invention, by introducing stress absorption units made of resin material into the display substrate, the stress generated by the display substrate being bent is released by the resin material, and thin film transistors on the display substrate are thus less likely to be damaged, so that the reliability of the whole display substrate is improved.
1. A display substrate, comprising:
a base substrate, and
a plurality of thin film transistors disposed on the base substrate,
wherein the display substrate further comprises two stress absorption units disposed on the base substrate and between two adjacent thin film transistors of the plurality of thin film transistors, each of the two stress absorption units being separated from the two adjacent thin film transistors,
wherein the display substrate further comprises a plurality of insulating layers disposed on the base substrate, the plurality of insulating layers are a gate insulating layer, an interlayer insulating layer and a first passivation layer, which are sequentially disposed on the base substrate in the following order: the gate insulating layer disposed over the base substrate; the interlayer insulating layer disposed over the gate insulating layer; and the first passivation layer disposed over the interlayer insulating layer, and
wherein the two stress absorption units are disposed in openings formed in the gate insulating layer and the first passivation layer, respectively, and are separated from each other only by the interlayer insulating layer.
2. The display substrate according to claim 1 , wherein the two stress absorption units are disposed in the openings of a same size formed in the gate insulating layer and the first passivation layer, respectively.
3. The display substrate according to claim 1 , further comprising anodes disposed above the plurality of thin film transistors and electrically connected to drains of the plurality of thin film transistors, respectively, wherein a luminous layer is provided above the anodes, and then cathodes are provided above the luminous layer; overlap regions of the anodes, the luminous layer and the cathodes form luminous regions, respectively; and the two stress absorption units are located under the luminous regions, respectively.
4. The display substrate according to claim 2 , further comprising anodes disposed above the plurality of thin film transistors and electrically connected to drains of the plurality of thin film transistors, respectively, wherein a luminous layer is provided above the anodes, and then cathodes are provided above the luminous layer; overlap regions of the anodes, the luminous layer and the cathodes form luminous regions, respectively; and the two stress absorption units are located under the luminous regions, respectively.
5. The display substrate according to claim 1 , wherein the two stress absorption units are made of resin material.
6. The display substrate according to claim 5 , wherein the resin material is acrylic resin or polyimide resin.
7. A method for manufacturing a display substrate, the method comprising:
preparing a base substrate; and
arranging a plurality of thin film transistors and a plurality of insulating layers on the base substrate,
wherein the plurality of insulating layers are a gate insulating layer, an interlayer insulating layer and a first passivation layer, which are sequentially disposed on the base substrate in the following order: the gate insulating layer disposed over the base substrate; the interlayer insulating layer disposed over the gate insulating layer; and the first passivation layer disposed over the interlayer insulating layer, and
wherein the method further comprises:
a step of arranging two stress absorption units on the base substrate and between two adjacent thin film transistors of the plurality of thin film transistors such that the two stress absorption units are disposed in openings formed in the gate insulating layer and the first passivation layer, respectively, and are separated from each other only by the interlayer insulating layer, each of the two stress absorption units being separated from the two adjacent thin film transistors.
8. The method according to claim 7 , wherein the step of arranging the two stress absorption units on the base substrate and between the two adjacent thin film transistors such that the two stress absorption units are disposed in the openings formed in the gate insulating layer and the first passivation layer, respectively, comprises:
forming, in the gate insulating layer and the first passivation layer between the two adjacent thin film transistors, two through holes penetrating through the gate insulating layer and the first passivation layer, respectively, by a patterning process; and
filling the two through holes with resin material.
9. The method according to claim 7 , further comprising:
arranging, above the plurality of thin film transistors, anodes electrically connected to drains of the plurality of thin film transistors, respectively; and
sequentially arranging a luminous layer and cathodes above the anodes so that overlap regions of the anodes, the luminous layer and the cathodes form luminous regions, respectively.
10. The method according to claim 7 , wherein the two stress absorption units are made of resin material.
11. The method according to claim 10 , wherein the resin material is acrylic resin or polyimide resin.
12. A flexible display device, comprising:
a display substrate, the display substrate comprising:
a base substrate, and
a plurality of thin film transistors disposed on the base substrate,
wherein the display substrate further comprises two stress absorption units disposed on the base substrate and between two adjacent thin film transistors of the plurality of thin film transistors, each of the two stress absorption units being separated from the two adjacent thin film transistors,
wherein the display substrate further comprises a plurality of insulating layers disposed on the base substrate, the plurality of insulating layers are a gate insulating layer, an interlayer insulating layer and a first passivation layer, which are sequentially disposed on the base substrate in the following order: the gate insulating layer disposed over the base substrate; the interlayer insulating layer disposed over the gate insulating layer; and the first passivation layer disposed over the interlayer insulating layer, and
wherein the two stress absorption units are disposed in openings formed in the gate insulating layer and the first passivation layer, respectively, and are separated from each other only by the interlayer insulating layer.