Method of manufacturing sensor device
A method of manufacturing a sensor device is provided. In the method, sensing electrodes are formed on a substrate, a sensing material layer is formed on the sensing electrodes. The sensing material layer is etched to form a first nanowire sensing region, a second nanowire sensing region and a third nanowire sensing region respectively between every two sensing electrodes of the sensing electrodes. A dielectric layer is formed to cover the first nanowire sensing region, the second nanowire sensing region and the third nanowire sensing region, and the first nanowire sensing region and the third nanowire sensing region are exposed.
1. A method for manufacturing a sensor device, comprising:
forming a plurality of sensing electrodes on a substrate;
forming a sensing material layer on the plurality of sensing electrodes;
etching the sensing material layer to form a first nanowire sensing region, a second nanowire sensing region and a third nanowire sensing region respectively between every two sensing electrodes of the plurality of sensing electrodes;
forming a dielectric layer to cover the first nanowire sensing region, the second nanowire sensing region and the third nanowire sensing region; and
exposing the first nanowire sensing region and the third nanowire sensing region.
2. The method according to claim 1 , wherein the step of exposing the first nanowire sensing region and the third nanowire sensing region comprises removing the dielectric layer on the first nanowire sensing region and the third nanowire sensing region to form a plurality of pad openings.
3. The method according to claim 1 , further comprising forming a hydrophilic material layer on the first nanowire sensing region after the step of exposing the first nanowire sensing region and the third nanowire sensing region.
4. The method according to claim 3 , wherein the hydrophilic material layer comprises aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), tin oxide (SnO 2 ), Zinc chromate (ZnCr 2 O 4 ) or magnesium chromate (MgCr 2 O 4 ).
5. The method according to claim 3 , further comprising removing the dielectric layer on the plurality of sensing electrodes to form a plurality of pad openings after the step of forming the hydrophilic material layer.
6. The method according to claim 1 , wherein the step of exposing the first nanowire sensing region and the third nanowire sensing region comprises:
removing the dielectric layer on the first nanowire sensing region;
forming a hydrophilic material layer on the first nanowire sensing region; and
removing the dielectric layer on the plurality of sensing electrodes to form a plurality of pad openings after forming the hydrophilic material layer; and
removing the dielectric layer on the third nanowire sensing region.
7. The method according to claim 6 , wherein the hydrophilic material layer comprises aluminum oxide (Al 2 O 3 ), titanium oxide (TiO 2 ), tin oxide (SnO 2 ), Zinc chromate (ZnCr 2 O 4 ) or magnesium chromate (MgCr 2 O 4 ).
8. The method according to claim 1 , wherein the dielectric layer comprises silicon oxide (SiO 2 ) or silicon nitride (SiN).
9. The method according to claim 1 , wherein a material of the plurality of sensing electrodes comprises at least one pure metal of or an alloy of platinum (Pt), titanium (Ti), tungsten (W), copper (Cu) and aluminum (Al), but excluding pure copper.
10. The method according to claim 1 , wherein the sensing material layer comprises tin oxide (SnO 2 ), titanium oxide (TiO 2 ), zinc oxide (ZnO) or polysilicon (poly Si).