Image Sensor Device
An image sensor device is provided. The image sensor device includes a substrate having a first surface, a second surface, and a light-sensing region. The image sensor device includes a first isolation structure in the substrate and adjacent to the first surface. The first isolation structure surrounds the light-sensing region. The image sensor device includes a second isolation structure passing through the first isolation structure and the substrate under the first isolation structure. The second isolation structure surrounds the light-sensing region and a portion of the first isolation structure.
1. An image sensor device, comprising:
a substrate having a first surface, a second surface, and a light-sensing region;
a first isolation structure in the substrate and adjacent to the first surface, wherein the first isolation structure surrounds the light-sensing region; and
a second isolation structure passing through the first isolation structure and the substrate under the first isolation structure, wherein the second isolation structure surrounds the light-sensing region and a portion of the first isolation structure.
2. The image sensor device as claimed in claim 1 , wherein a first top surface of the first isolation structure and a second top surface of the second isolation structure are substantially coplanar.
3. The image sensor device as claimed in claim 1 , wherein the second surface of the substrate and a bottom surface of the second isolation structure are substantially coplanar.
4. The image sensor device as claimed in claim 1 , further comprising:
a passivation layer between the second isolation structure and the first isolation structure and between the second isolation structure and the substrate.
5. The image sensor device as claimed in claim 4 , wherein the passivation layer is doped with boron, phosphorous, nitrogen, arsenic, or fluorine, and the passivation layer surrounds the light-sensing region.
6. The image sensor device as claimed in claim 4 , wherein a first top surface of the first isolation structure, a second top surface of the second isolation structure, and a third top surface of the passivation layer are substantially coplanar.
7. The image sensor device as claimed in claim 4 , wherein a first bottom surface of the second isolation structure and a second bottom surface of the passivation layer are substantially coplanar.
8. The image sensor device as claimed in claim 4 , wherein the second isolation structure surrounds a portion of the passivation layer.
9. The image sensor device as claimed in claim 1 , further comprising:
a color filter over the second surface, wherein the second surface is between the first surface and the color filter.
10. The image sensor device as claimed in claim 1 , wherein the portion of the first isolation structure continuously surrounds the light-sensing region.
11. An image sensor device, comprising:
a substrate having a first surface, a second surface, and a light-sensing region;
a first isolation structure in the substrate, wherein the first isolation structure surrounds the light-sensing region, and the first isolation structure partially protrudes from the first surface; and
a second isolation structure passing through the first isolation structure and the substrate under the first isolation structure, wherein the second isolation structure surrounds the light-sensing region.
12. The image sensor device as claimed in claim 11 , wherein the second isolation structure partially protrudes from the first surface.
13. The image sensor device as claimed in claim 11 , wherein a first top surface of the first isolation structure and a second top surface of the second isolation structure are substantially coplanar.
14. The image sensor device as claimed in claim 11 , further comprising:
a device over the first surface, wherein the device comprises an active device or a passive device, and the first isolation structure is between the device and the second isolation structure.
15. The image sensor device as claimed in claim 11 , further comprising:
a reflective grid over the second surface, wherein the reflective grid is right over the second isolation structure.
16. An image sensor device, comprising:
a substrate having a first surface, a second surface, and a light-sensing region;
a first isolation structure in the substrate and adjacent to the first surface, wherein the first isolation structure surrounds the light-sensing region, and a first portion of the substrate is between the first isolation structure and the second surface; and
a second isolation structure passing through the first isolation structure and the first portion of the substrate, wherein the second isolation structure surrounds the light-sensing region and a second portion of the first isolation structure.
17. The image sensor device as claimed in claim 16 , wherein the second portion of the first isolation structure continuously surrounds the light-sensing region.
18. The image sensor device as claimed in claim 16 , wherein a first width of the second isolation structure decreases from the first surface to the second surface.
19. The image sensor device as claimed in claim 18 , wherein a second width of the first isolation structure decreases from the first surface toward the second surface.
20. The image sensor device as claimed in claim 16 , further comprising:
a lens over the second surface, wherein the lens is over the light-sensing region.