Diffuser for lamp heating assembly
Embodiments of the present disclosure generally relate to optically transparent windows and processing chambers including the same. The optically transparent window includes light-diffusing structures formed thereon. The light diffusing structures may include a scalloped or dimpled surface having protruding or indented features, or a frosted surface. The light-diffusing structures facilitate more uniform heating of substrates by reducing thermal hot spots caused by uneven irradiation by lamps.
1. A processing chamber, comprising:
a chamber body;
a substrate support positioned within the chamber body and adapted to support a substrate in a support plane;
a radiant heat source disposed within the chamber body to direct radiant heat towards the support plane, the radiant heat source comprising a plurality of tubes disposed in a hexagonal arrangement; and
an optically transparent window disposed between the support plane and the radiant heat source, the optically transparent window comprising a plurality of light-diffusing structures disposed on a bottom surface thereof, the plurality of light-diffusing structures comprising a frosted surface of the optically transparent window or one or more Fresnel lenses, wherein each tube of the plurality of tubes is positioned between the light-diffusing structures.
2. The processing chamber of claim 1 , wherein the plurality of light-diffusing structures is the frosted surface of the optically transparent window.
3. The processing chamber of claim 2 , wherein the frosted surface of the optically transparent window is adjacent the substrate support.
4. The processing chamber of claim 2 , wherein the frosted surface of the optically transparent window is adjacent the radiant heat source.
5. The processing chamber of claim 1 , wherein the plurality of light-diffusing structures is the one or more Fresnel lenses.
6. A processing chamber, comprising:
a chamber body;
a substrate support positioned within the chamber body and adapted to support a substrate in a support plane;
a radiant heat source disposed within the chamber body beneath the support plane, the radiant heat source comprising a plurality of tubes disposed in a hexagonal arrangement; and
an optically transparent window disposed between the support plane and the radiant heat source, the optically transparent window comprising a plurality of light-diffusing structures disposed on a bottom surface thereof, the plurality of light-diffusing structures comprising a frosted surface of the optically transparent window or one or more Fresnel lenses, wherein each tube of the plurality of tubes is positioned between the light-diffusing structures.
7. The processing chamber of claim 6 , wherein the plurality of light-diffusing structures is the frosted surface of the optically transparent window.
8. The processing chamber of claim 6 , wherein the optically transparent window includes at least one light-diffusing structure on a first side thereof, and a second light-diffusing structure on a second side opposite the first side.
9. The processing chamber of claim 6 , wherein the plurality of light-diffusing structures comprises multiple, discrete light-diffusing structures.
10. The processing chamber of claim 6 , wherein the plurality of light-diffusing structures is the one or more Fresnel lenses.
11. A processing chamber, comprising:
a chamber body;
a substrate support positioned within the chamber body;
a radiant heat source disposed within the chamber body to direct radiant heat towards the substrate support, the radiant heat source comprising a plurality of tubes disposed in a hexagonal arrangement; and
an optically transparent window disposed between the substrate support and the radiant heat source, the optically transparent window comprising a plurality of light-diffusing structures disposed on a bottom surface thereof the plurality of light-diffusing structures comprising a frosted surface of the optically transparent window or one or more Fresnel lenses, wherein each of the tubes is positioned between the light-diffusing structures.
12. The processing chamber of claim 11 , wherein the plurality of light-diffusing structures is the one or more Fresnel lenses.
13. The processing chamber of claim 11 , wherein the plurality of light-diffusing structures is the frosted surface.