Hall element
A hall element is provided to suppress fluctuation in a Hall output voltage of the hall element which is generated due to a fluctuation in stress. The hall element may be formed to include a substrate, a magnetosensitive portion formed on the substrate, an insulating film formed on the magnetosensitive portion, four conductive portions (electrode portions and contact portions) which are formed on the insulating film, electrically connected to the magnetosensitive portion through the insulating film, and disposed at positions serving as vertexes of a quadrangle, and ball portions electrically connected to the conductive portions, and at least one ball portion is disposed on a diagonal line of the quadrangle formed by a region surrounded by the four conductive portions and above a portion where the conductive portion and the insulating film are in contact with each other.
1. A hall element comprising:
a substrate;
a magnetosensitive portion formed on the substrate;
an insulating film formed on the magnetosensitive portion;
four conductive portions configured formed on the insulating film and electrically connected to the magnetosensitive portion through the insulating film; and
ball portions connected to the conductive portions,
wherein at least one of the ball portions is disposed on a diagonal line of a quadrangle formed by a region surrounded by the four conductive portions and is disposed above a region covering a portion where the magnetosensitive portion, the conductive portions and the insulating film are in contact with each other in view of a cross section.
2. The hall element according to claim 1 ,
wherein the ball portions are disposed above a portion where the insulating film is in contact with at least one of the conductive portions which are positioned on the same diagonal line among the four conductive portions and included in at least one conductive portion pair.
3. The hall element according to claim 1 ,
wherein the ball portions are disposed above a portion where the insulating film is in contact with each of the four conductive portions.
4. The hall element according to claim 1 ,
wherein the conductive portion includes
an electrode portion formed on the insulating film to extend in a direction in which the conductive portions are close to each other, and
a contact portion electrically connecting the electrode portion and the magnetosensitive portion to each other through the insulating film,
wherein the ball portion is disposed on the diagonal line of the quadrangle and above the region covering the portion where the magnetosensitive portion, the conductive portions and the insulating film are in contact with each other in view of the cross section.
5. The hall element according to claim 1 ,
wherein the magnetosensitive portion has a quadrangular shape, and
wherein the conductive portions are disposed at corner portions of the magnetosensitive portion, respectively.
6. The hall element according to claim 2 ,
wherein each of the conductive portions includes
an electrode portion formed on the insulating film to extend in a direction in which the conductive portions are close to each other, and
a contact portion electrically connecting the electrode portion and the magnetosensitive portion to each other through the insulating film,
wherein the ball portion is disposed on the diagonal line of the quadrangle and above a portion where the contact portion and the insulating film are in contact with each other.
7. The hall element according to claim 3 ,
wherein each of the conductive portions includes
an electrode portion formed on the insulating film to extend in a direction in which the conductive portions are close to each other, and
a contact portion electrically connecting the electrode portion and the magnetosensitive portion to each other through the insulating film,
wherein the ball portion is disposed on the diagonal line of the quadrangle and above the region covering the portion where the magnetosensitive portion, the conductive portions and the insulating film are in contact with each other in view of the cross section.
8. The hall element according to claim 2 ,
wherein the magnetosensitive portion has a quadrangular shape, and
wherein the conductive portions are disposed at corner portions of the magnetosensitive portion, respectively.
9. The hall element according to claim 3 ,
wherein the magnetosensitive portion has a quadrangular shape, and
wherein the conductive portions are disposed at corner portions of the magnetosensitive portion, respectively.
10. The hall element according to claim 4 ,
wherein the magnetosensitive portion has a quadrangular shape, and
wherein the conductive portions are disposed at corner portions of the magnetosensitive portion, respectively.
11. The hall element according to claim 6 ,
wherein the magnetosensitive portion has a quadrangular shape, and
wherein the conductive portions are disposed at corner portions of the magnetosensitive portion, respectively.
12. The hall element according to claim 7 ,
wherein the magnetosensitive portion has a quadrangular shape, and
wherein the conductive portions are disposed at corner portions of the magnetosensitive portion, respectively.