Membrane components and method for forming a membrane component
A membrane component comprises a membrane structure comprising an electrically conductive membrane layer. The electrically conductive membrane layer has a suspension region and a membrane region. In addition, the suspension region of the electrically conductive membrane layer is arranged on an insulation layer. Furthermore, the insulation layer is arranged on a carrier substrate. Moreover, the membrane component comprises a counterelectrode structure. A cavity is arranged vertically between the counterelectrode structure and the membrane region of the electrically conductive membrane layer. In addition, an edge of the electrically conductive membrane layer projects laterally beyond an edge of the insulation layer by more than half of a vertical distance between the electrically conductive membrane layer and the counterelectrode structure.
1. A membrane component, comprising:
a membrane structure comprising an electrically conductive membrane layer, wherein the electrically conductive membrane layer has a suspension region and a membrane region, wherein the suspension region of the electrically conductive membrane layer is arranged on an insulation layer, and wherein the insulation layer is arranged on a carrier substrate; and
a counterelectrode structure, wherein a cavity is arranged vertically between the counterelectrode structure and the membrane region of the electrically conductive membrane layer,
wherein an edge of the electrically conductive membrane layer projects laterally beyond an edge of the insulation layer by more than half of a vertical distance between the electrically conductive membrane layer and the counterelectrode structure, and wherein the electrically conductive membrane layer takes up more than 90% of forces which are exerted on the membrane structure when a deflection of the membrane region of the electrically conductive membrane layer deflects.
2. The membrane component as claimed in claim 1 , wherein the counterelectrode structure comprises a cutout with an insulation structure, and wherein at least one part of the insulation structure is arranged at least one part of a wall of the cutout of the counterelectrode structure.
3. The membrane component as claimed in claim 2 , wherein a material of the insulation structure and a material of the insulation layer are different.
4. The membrane component as claimed in claim 2 , wherein a second part of the insulation structure extends from an electrically conductive counterelectrode layer of the counterelectrode structure vertically into the cavity.
5. The membrane component as claimed in claim 4 , wherein the cutout divides the electrically conductive counterelectrode layer into a first part and a second part, and wherein the first part and the second part are electrically insulated from one another.
6. The membrane component as claimed in claim 5 , wherein the first part of the electrically conductive counterelectrode layer is connected to a contact structure, and wherein the second part of the electrically conductive counterelectrode layer is potential-free.
7. The membrane component as claimed in claim 1 , wherein the carrier substrate comprises a cutout, and wherein the insulation layer laterally surrounds the cutout.
8. The membrane component as claimed in claim 1 , wherein an anti-stick layer is arranged at a surface of the membrane region of the electrically conductive membrane layer.
9. The membrane component as claimed in claim 8 , wherein the anti-stick layer is a perfluorodecyltrichlorosilane (FDTS) layer.
10. A membrane component, comprising:
a membrane structure comprising an electrically conductive membrane layer, wherein the electrically conductive membrane layer comprises a first electrically conductive material, wherein the electrically conductive membrane layer has a suspension region and a membrane region, wherein the suspension region of the electrically conductive membrane layer is arranged on an insulation layer, and wherein the insulation layer is arranged on a carrier substrate; and
a counterelectrode structure having an electrically conductive counterelectrode layer, wherein the electrically conductive counterelectrode layer comprises a second electrically conductive material, wherein a cavity is arranged vertically between the counterelectrode structure and the membrane region of the electrically conductive membrane layer, and wherein the first electrically conductive material differs from the second electrically conductive material.
11. The membrane component as claimed in claim 10 , wherein the first electrically conductive material is polysilicon, and wherein the second electrically conductive material is at least one from a metal and an alloy.