Studying dynamic specimen behavior in a charged-particle microscope
A method of using a Charged Particle Microscope, comprising: A specimen holder, for holding a specimen; A source, for producing an irradiating beam of charged particles; An illuminator, for directing said beam so as to irradiate the specimen; A detector, for detecting a flux of emergent radiation emanating from the specimen in response to said irradiation, additionally comprising the following steps: In said illuminator, providing an aperture plate comprising an array of apertures; Using a deflecting device to scan said beam across said array, thereby alternatingly interrupting and transmitting the beam so as to produce a train of beam pulses; Irradiating said specimen with said train of pulses, and using said detector to perform positionally resolved (temporally discriminated) detection of the attendant emergent radiation.
1. A method of using a Charged Particle Microscope, comprising:
a specimen holder, for holding a specimen;
a source, for producing an irradiating beam of charged particles;
an illuminator, for directing said beam so as to irradiate the specimen; and
a detector, for detecting a flux of emergent radiation emanating from the specimen in response to said irradiation,
the method comprising:
in said illuminator, providing an aperture plate comprising an array of apertures;
using a deflecting device to scan said beam across said array, thereby alternatingly interrupting and transmitting the beam so as to produce a train of beam pulses; and
irradiating said specimen with said train of pulses, and using said detector to perform positionally resolved detection of the attendant emergent radiation.
2. A method according to claim 1 , wherein said deflecting device comprises a resonant RF cavity through which the beam passes.
3. A method according to claim 2 , wherein said cavity is excited in TM 110 mode.
4. A method according to claim 1 , wherein, prior to entering said deflecting device, said beam is pulsed.
5. A method according to claim 1 , wherein a plane of said deflecting device is imaged onto a plane of said specimen.
6. A method according to claim 1 , wherein said aperture plate is located at an intermediate beam crossover point between said deflecting device and said specimen.
7. A method according to claim 1 , wherein, in said train of pulses, successive pulses have a separation in the range 1-100 picoseconds.
8. A method according to claim 1 , wherein said detector is used to register a time-resolved series of diffraction patterns generated by said specimen.
9. A method according to claim 2 , wherein, prior to entering said deflecting device, said beam is pulsed.
10. A method according to claim 3 , wherein, prior to entering said deflecting device, said beam is pulsed.
11. A method according to claim 2 , wherein a plane of said deflecting device is imaged onto a plane of said specimen.
12. A method according to claim 3 , wherein a plane of said deflecting device is imaged onto a plane of said specimen.
13. A method according to claim 4 , wherein a plane of said deflecting device is imaged onto a plane of said specimen.
14. A method according to claim 2 , wherein said aperture plate is located at an intermediate beam crossover point between said deflecting device and said specimen.
15. A method according to claim 3 , wherein said aperture plate is located at an intermediate beam crossover point between said deflecting device and said specimen.
16. A method according to claim 2 , wherein, in said train of pulses, successive pulses have a separation in the range 1-100 picoseconds.
17. A method according to claim 3 , wherein, in said train of pulses, successive pulses have a separation in the range 1-100 picoseconds.
18. A method according to claim 2 , wherein said detector is used to register a time-resolved series of diffraction patterns generated by said specimen.
19. A method according to claim 3 , wherein said detector is used to register a time-resolved series of diffraction patterns generated by said specimen.
20. A Charged Particle Microscope, comprising:
a specimen holder, for holding a specimen;
a source, for producing an irradiating beam of charged particles;
an illuminator, for directing said beam so as to irradiate the specimen;
a detector, for detecting a flux of emergent radiation emanating from the specimen in response to said irradiation;
an electronic controller, for controlling aspects of the microscope's operation,
a beam deflecting device;
an aperture plate comprising an array of apertures, disposed in said illuminator, and in that said electronic controller is configured to:
drive said deflecting device so as to scan said beam across said array, thereby alternatingly interrupting and transmitting the beam so as to produce a train of beam pulses to irradiate said specimen; and
use said detector to perform positionally resolved detection of the attendant emergent radiation.