Radiofrequency switch device and manufacturing method thereof
A radiofrequency switch device includes an insulation layer, a semiconductor layer, a gate structure, a first doped region, a second doped region, an epitaxial layer, a first silicide layer, and a second silicide layer. The semiconductor layer is disposed on the insulation layer. The gate structure is disposed on the semiconductor layer. The first doped region and the second doped region are disposed in the semiconductor layer at two opposite sides of the gate structure respectively. The epitaxial layer is disposed on the first doped region. The first silicide layer is disposed on the epitaxial layer. The second silicide layer is disposed in the second doped region.
1. A radiofrequency (RF) switch device, comprising:
an insulation layer;
a semiconductor layer disposed on the insulation layer;
a gate structure disposed on the semiconductor layer;
a first doped region and a second doped region, wherein the first doped region and the second doped region are disposed in the semiconductor layer and disposed at two opposite sides of the gate structure respectively;
an epitaxial layer disposed on the first doped region;
a first silicide layer disposed on the epitaxial layer;
a second silicide layer disposed in the second doped region;
a first interlayer dielectric disposed on the gate structure, the semiconductor layer, and the first silicide layer;
a first connection structure disposed in the first interlayer dielectric and disposed on the first silicide layer, wherein the first connection structure is electrically connected with the first silicide layer;
a second interlayer dielectric disposed under the semiconductor layer; and
a second connection structure disposed in the second interlayer dielectric, wherein the second connection structure is electrically connected with the second silicide layer.
2. The RF switch device according to claim 1 , wherein the first doped region is a source doped region, and the second doped region is a drain doped region.
3. The RF switch device according to claim 1 , wherein a top surface of the first silicide layer is higher than a top surface of the second silicide layer in a thickness direction of the insulation layer.
4. The RF switch device according to claim 3 , wherein a bottom surface of the first silicide layer is higher than a top surface of the semiconductor layer in the thickness direction of the insulation layer.
5. The RF switch device according to claim 1 , wherein a bottom surface of the first silicide layer is higher than a top surface of the second silicide layer in a thickness direction of the insulation layer.
6. The RF switch device according to claim 1 , wherein a top surface of the semiconductor layer is higher than a top surface of the second silicide layer in a thickness direction of the insulation layer.
7. The RF switch device according to claim 1 , wherein a part of the second doped region is disposed between the first interlayer dielectric and the second silicide layer.
8. The RF switch device according to claim 1 , wherein the insulation layer comprises an opening corresponding to the second silicide layer, and a part of the second connection structure is disposed in the opening.
9. A manufacturing method of a radiofrequency (RF) switch device, comprising:
providing a semiconductor layer formed on an insulation layer;
forming a gate structure on the semiconductor layer;
forming a first doped region and a second doped region in the semiconductor layer, wherein the first doped region and the second doped region are formed at two opposite sides of the gate structure respectively;
forming an epitaxial layer on the first doped region;
forming a first silicide layer on the epitaxial layer;
forming a second silicide layer in the second doped region;
forming a first interlayer dielectric on the gate structure, the semiconductor layer, and the first silicide layer;
forming a first connection structure in the first interlayer dielectric and on the first silicide layer, wherein the first connection structure is electrically connected with the first silicide layer;
forming a second interlayer dielectric under the semiconductor layer; and
forming a second connection structure in the second interlayer dielectric, wherein the second connection structure is electrically connected with the second silicide layer.
10. The manufacturing method of the RF switch device according to claim 9 , wherein the first doped region is a source doped region, and the second doped region is a drain doped region.
11. The manufacturing method of the RF switch device according to claim 9 , wherein a top surface of the first silicide layer is higher than a top surface of the second silicide layer in a thickness direction of the insulation layer.
12. The manufacturing method of the RF switch device according to claim 11 , wherein a bottom surface of the first silicide layer is higher than a top surface of the semiconductor layer in the thickness direction of the insulation layer.
13. The manufacturing method of the RF switch device according to claim 9 , wherein a bottom surface of the first silicide layer is higher than a top surface of the second silicide layer in a thickness direction of the insulation layer.
14. The manufacturing method of the RF switch device according to claim 9 , wherein a top surface of the semiconductor layer is higher than a top surface of the second silicide layer in a thickness direction of the insulation layer.
15. The manufacturing method of the RF switch device according to claim 9 , wherein the second silicide layer is formed after the step of forming the first silicide layer.
16. The manufacturing method of the RF switch device according to claim 9 , wherein the second silicide layer and the first silicide layer are formed by the same step, and the second silicide layer and the first silicide layer are formed after the step of forming the epitaxial layer.
17. The manufacturing method of the RF switch device according to claim 9 , wherein the second interlayer dielectric is formed after the step of forming the first connection structure.