Self-aligned epitaxy layer
Semiconductor structures including active fin structures, dummy fin structures, epitaxy layers, a Ge containing oxide layer and methods of manufacture thereof are described. By implementing the Ge containing oxide layer on the surface of the epitaxy layers formed on the source/drain regions of some of the FinFET devices, a self-aligned epitaxy process is enabled. By implementing dummy fin structures and a self-aligned etch, both the epitaxy layers and metal gate structures from adjacent FinFET devices are isolated in a self-aligned manner.
1. A fin field effect transistor (FinFET) device structure comprising:
a substrate;
a first fin structure protruding from the substrate and doped with n-type dopants;
a second fin structure protruding from the substrate, wherein an upper section of the second fin structure is doped with p-type dopants;
a first epitaxy layer formed on a source/drain region of the first fin structure;
a second epitaxy layer formed on a source/drain region of the second fin structure;
a third fin structure formed between the first and second fin structures and between the first and second epitaxy layers, wherein the third fin structure is formed with a different material than the first and second fin structures; and
a germanium (Ge) containing oxide layer formed on the second epitaxy layer.
2. The FinFET device structure of claim 1 , wherein the Ge containing oxide layer is in contact with the third fin structure.
3. The FinFET device structure of claim 1 , wherein the Ge containing oxide layer has a Ge concentration between about 40% and about 70%.
4. The FinFET device structure of claim 1 , wherein the Ge containing oxide layer has a thickness between about 1 nm and about 3 nm.
5. The FinFET device structure of claim 1 , further comprising a dielectric layer formed on the substrate and disposed between the first and second fin structures, wherein a top surface of the dielectric layer is below a top surface of each of the first and second fin structures.
6. The FinFET device structure of claim 1 , wherein the distance between the first fin structure and the second fin structure is between about 25 nm and about 55 nm.
7. The FinFET device structure of claim 1 , wherein a width of each of the first, second and third fin structures is between about 5 nm and about 20 nm.
8. The FinFET device structure of claim 1 , wherein the distance from the third fin structure to each of the first and second fin structures is greater than the width of each of the first and second fin structures.
9. The FinFET device structure of claim 1 , wherein the third fin structure comprises silicon carbon nitride (SiCN), silicon oxygen carbon nitride (SiOCN), hafnium oxide (HfO2), zirconium oxide (ZrO2), or aluminum oxide (Al2O3).
10. A semiconductor structure comprising:
a substrate;
a plurality of first fin structures doped with n-type dopants and protruding from the substrate;
a plurality of second fin structures protruding from the substrate and parallel to the plurality of first fin structures, wherein the plurality of second fin structures have an upper section doped with p-type dopants;
a dielectric layer formed on the substrate and on a side surface of each of the first and second fin structures, wherein a top surface of the dielectric layer is below a top surface of the first and second fin structures;
a plurality of dummy fin structures parallel to the plurality of first fin structures and the plurality of second fin structures, wherein at least one of the plurality of dummy fin structures is formed between each of the first fin structures and each of the second fin structures, and wherein the plurality of dummy fin structures have a bottom surface below the top surface of the dielectric layer;
a silicon germanium (SiGe) epitaxy layer formed on the plurality of second fin structures;
a germanium (Ge) containing oxide layer formed on the SiGe epitaxy layer; and
a silicon (Si) epitaxy layer formed on the plurality of first fin structures.
11. The semiconductor structure of claim 10 , further comprising a metal gate structure formed over a top surface and the side surface of each of the first and second fin structures.
12. The semiconductor structure of claim 10 , wherein the Ge containing oxide layer is in contact with the side surface of the plurality of dummy fin structures.
13. The semiconductor structure of claim 10 , wherein the Ge containing oxide layer has a Ge concentration between about 40% and about 70% and a thickness between about 1 nm and about 3 nm.
14. The semiconductor structure of claim 10 , wherein the plurality of dummy fin structures comprise silicon carbon nitride (SiCN), silicon oxygen carbon nitride (SiOCN), hafnium oxide (HfO2), zirconium oxide (ZrO2), or aluminum oxide (Al2O3).
15. A fin field effect transistor (FinFET) device structure comprising:
a substrate;
first and second fin structures protruding from the substrate, wherein upper sections of the respective first and second fin structures are doped with p-type dopants;
first and second epitaxy layers respectively formed on source/drain regions of the first and second fin structures;
a third fin structure formed between the first and second epitaxy layers, wherein the third fin structure is formed with a different material than the first and second fin structures; and
an oxide layer formed on the second epitaxy layer, wherein the oxide layer comprises germanium (Ge).
16. The FinFET device structure of claim 15 , wherein the oxide layer is in contact with the third fin structure.
17. The FinFET device structure of claim 15 , wherein the oxide layer has a Ge concentration between about 40% and about 70%.
18. The FinFET device structure of claim 15 , wherein the oxide layer has a thickness between about 1 nm and about 3 nm.
19. The FinFET device structure of claim 15 , wherein the third fin structure comprises silicon carbon nitride (SiCN), silicon oxygen carbon nitride (SiOCN), hafnium oxide (HfO2), zirconium oxide (ZrO2), or aluminum oxide (Al2O3).
20. The FinFET device structure of claim 15 , wherein a distance between the first fin structure and the second fin structure is between about 25 nm and about 55 nm.