Method of manufacturing a flexible conductive track arrangement, flexible conductive track arrangement and neurostimulation system
Disclosed is a method of manufacturing a flexible conductive track arrangement for a neurostimulation system such as a cochlear implant device. The method allows for the arrangement to be manufactured without the need for a transfer substrate by embedding the metal structures of the arrangement in a ceramic dielectric material formed in an atomic layer deposition process, which can be performed at a temperature that is compatible with the polymer processing steps of such an arrangement. A flexible conductive track arrangement and a neurostimulation system are also disclosed.
1. A flexible conductive track arrangement, comprising:
a distal portion comprising a plurality of electrodes;
a proximal portion comprising a plurality of contacts;
a strip between the distal portion and the proximal portion, the strip comprising a plurality of conductive tracks, each track connecting an electrode to a contact, wherein the conductive tracks are embedded in an dielectric layer, said dielectric layer being embedded in a biocompatible polymer layer, wherein the biocompatible polymer layer has at least one outer polymer surface that is substantially flat and wherein the dielectric layer has a thickness of less than 500 nm; and
a central rod, wherein the flexible conductive track is wound around the central rod in a spiralling fashion with the substantially flat surface facing the central rod.
2. The flexible conductive track arrangement of claim 1 , wherein the dielectric layer has a thickness of less than 300 nm.
3. The flexible conductive track arrangement of claim 1 , wherein the dielectric layer comprises at least one of silicon oxide, silicon nitride, aluminum oxide, and other inorganic oxide.
4. A neurostimulation device, comprising:
a flexible conductive track arrangement comprising:
a distal portion including a plurality of electrodes;
a proximal portion comprising a plurality of contacts;
a strip between the distal portion and the proximal portion, the strip comprising a plurality of conductive tracks, each track connecting an electrode to a contact, wherein the conductive tracks are embedded in an dielectric layer, the dielectric layer being embedded in a biocompatible polymer layer, wherein the biocompatible polymer layer has at least one outer polymer surface that is substantially flat and wherein the dielectric layer has a thickness of less than 500 nm; and
a central rod, wherein the flexible conductive track is wound around the central rod in a spiralling fashion with the substantially flat surface facing the central rod; and
a neurostimulation detection having a plurality of further contacts for contacting respective contacts of the proximal portion of the flexible conductive track arrangement.
5. A hearing aid device comprising the neurostimulation device of claim 4 .