Movable diffraction grating, method of manufacturing the same, and external resonator type laser module

1. A movable diffraction grating comprising:

a support portion;

a movable portion swingably connected to the support portion;

a coil buried in the movable portion;

a magnetic field generator configured to apply a magnetic field to the coil;

an insulation layer provided on a surface of the movable portion;

a resin layer provided on the insulation layer and provided with a diffraction grating pattern; and

a reflection layer formed of a metal and provided on the resin layer to follow the diffraction grating pattern,

wherein the coil is disposed inside a groove formed in the surface of the movable portion, and

wherein a width of the coil is larger than a thickness of the cod.

2. The movable diffraction grating according to claim 1 ,

wherein the diffraction grating pattern is disposed in an area overlapping the coil when viewed in a direction perpendicular to the surface of the movable portion.

3. The movable diffraction grating according to claim 1 ,

wherein the diffraction grating pattern is a blazed grating pattern diffracting light having a wavelength in a mid-infrared region.

4. A method of manufacturing the movable diffraction grating according to claim 1 , comprising:

a first step of preparing a substrate including a portion corresponding to the support portion and the movable portion and forming the coil to be buried in the movable portion;

a second step of forming the insulation layer on the surface of the movable portion after the first step;

a third step of disposing, a resin material on the insulation layer after the second step;

a fourth step of forming the resin layer provided with the diffraction grating pattern by transferring a transfer pattern corresponding to the diffraction grating pattern to the resin material using a mold having the transfer pattern after the third step;

a fifth step of forming the reflection layer on the resin layer to follow the diffraction grating pattern after the fourth step; and

a sixth step of removing a portion other than the portion corresponding to the support portion and the movable portion in the substrate after the fifth step.

5. An external resonator type laser module comprising:

the movable diffraction grating according to claim 1 ; and

a quantum cascade laser element,

wherein the movable diffraction grating diffracts and reflects light oscillated by the quantum cascade laser element so that light having a specific wavelength is returned to the quantum cascade laser element.