Control method of movable body, exposure method, device manufacturing method, movable body apparatus, and exposure apparatus
In a beam irradiation apparatus in which a movable body holds an object, a mark detection system detects a first mark on the movable body while moving the movable body in a first direction and changing an irradiation position of a measurement beam in the first direction, the mark detection system detects a second mark while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction, a controller controls a position of the movable body in a second direction intersecting the first direction during a time period between the detection of the first mark and the detection of the second mark, and the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and a processing beam, based on results of the detection of the first and second marks.
1. A beam irradiation apparatus, comprising:
an irradiation system from which a processing beam is irradiated to an object to process the object with the processing beam;
a movable body that is movable relative to the irradiation system within a two-dimensional plane including a first direction and a second direction intersecting the first direction;
a mark detection system arranged separate from the irradiation system, from which a measurement beam is irradiated to the object placed on the movable body to detect marks of the object, the mark detection system having an optical member and an irradiation position of the measurement beam being changed in the first direction using the optical member; and
a controller,
wherein:
the controller controls movement of the movable body,
the mark detection system detects a first mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction,
the mark detection system detects a second mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction,
the controller controls a position of the movable body in the second direction during a time period between the detection of the first mark and the detection of the second mark, and
the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and the processing beam, based on results of the detection of the first mark and the detection of the second mark.
2. The beam irradiation apparatus according to claim 1 , wherein
the second mark is a mark that is detected after detection of the first mark.
3. The beam irradiation apparatus according to claim 2 , wherein
the controller estimates a center position of the second mark based on a detection result of the first mark.
4. The beam irradiation apparatus according to claim 3 , wherein
the controller estimates a positional shift amount of the second mark based on the detection result of the first mark.
5. The beam irradiation apparatus according to claim 4 , wherein
the controller compares the positional shift amount with a predetermined permissible value, and in a case where the positional shift amount is greater than the permissible value, detects the first mark again.
6. The beam irradiation apparatus according to claim 4 , wherein
the controller obtains a positional shift amount between a center of the first mark and an irradiation position of the measurement beam, and when detecting the second mark, relatively moves the movable body and the measurement beam in a direction of cancelling out positional shift, in accordance with the positional shift amount.
7. The beam irradiation apparatus according to claim 1 , wherein
the controller estimates a center position of the second mark based on a detection result of the first mark.
8. The beam irradiation apparatus according to claim 6 , wherein
the controller compares the positional shift amount with a predetermined permissible value, and in a case where the positional shift amount is greater than the permissible value, detects the first mark again.
9. The beam irradiation apparatus according to claim 1 , wherein
the first mark includes two or more marks,
the controller obtains a positional shift amount for each of the two or more marks, and performs adjustment of the positional relation between the object on the movable body and the processing beam based on the positional shift amount for each of the two or more marks.
10. The beam irradiation apparatus according to claim 9 , wherein
a movement trajectory of the movable body is calculated based on the positional shift amount for each of the two or more marks.
11. The beam irradiation apparatus according to claim 9 , wherein
the controller performs the adjustment of the positional relation between the object on the movable body and the processing beam, prior to detection of the first mark.
12. The beam irradiation apparatus according to claim 1 , wherein:
the controller obtains positional information, within the two-dimensional plane, of the object on the movable body, and adjusts the positional relation between the object on the movable body and the processing beam so that the mark detection system can detect at least the first mark.
13. The beam irradiation apparatus according to claim 12 , wherein
the controller performs adjustment of the positional relation between the object on the movable body and the processing beam, in a case where the mark detection system cannot detect the first mark.
14. The beam irradiation apparatus according to claim 1 , wherein
the controller moves the movable body along a predetermined movement course at a time of a detection operation of the first mark and the second mark, and
the first mark is a mark that can be detected first, of the plurality of marks, in a case where the movable body is moved along the predetermined movement course.
15. The beam irradiation apparatus according to claim 1 , wherein
a velocity at which the movable body is moved when the measurement beam is irradiated on the first mark is slower than a velocity at which the movable body is moved when the measurement beam is irradiated on the second mark.
16. The beam irradiation apparatus according to claim 15 , wherein
the velocity of the movable body is increased after the mark that can be detected first is detected.
17. The beam irradiation apparatus according to claim 1 , further comprising:
a surface position detection system that obtains surface position information of a surface of the object, wherein
the controller controls detection of the plurality of marks while controlling a surface position of the object based on the surface position information obtained and an offset value obtained beforehand.
18. The beam irradiation apparatus according to claim 1 , wherein
the controller performs calibration of the mark detection system using a reference index provided at the movable body.
19. The beam irradiation apparatus according to claim 18 , wherein
after the object is placed onto the movable body, the controller performs the calibration of the mark detection system before the plurality of marks are detected.
20. The beam irradiation apparatus according to claim 19 , wherein
the controller performs the calibration of the mark detection system also after detection of the plurality of marks has been completed.
21. The beam irradiation apparatus according to claim 18 , wherein
the controller performs the calibration of the mark detection system in the midst of detecting the plurality of marks.
22. A beam irradiation method, comprising:
irradiating an object with a processing beam from an irradiation system to process the object with the processing beam;
moving a movable body on which the object provided with a plurality of marks is placed, relative to the irradiation system within a two-dimensional plane including a first direction and a second direction intersecting the first direction,
detecting marks of the object by irradiating the object placed on the movable body with a measurement beam from a mark detection system arranged separate from the irradiation system, the mark detection system having an optical member, and an irradiation position of the measurement beam being changed in the first direction using the optical member; and
controlling the movable body with a controller;
wherein:
the mark detection system detects a first mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction,
the mark detection system detects a second mark of the marks while moving the movable body in the first direction and changing the irradiation position of the measurement beam in the first direction,
the controller controls a position of the movable body in the second direction during a time period between the detection of the first mark and the detection of the second mark, and
the controller controls the movement of the movable body to adjust a positional relation between the object on the movable body and the processing beam, based on results of the detection of the first mark and the detection of the second mark.