Crossbar resistive memory array with highly conductive copper/copper alloy electrodes and silver/silver alloys electrodes
Embodiments of the present invention provide systems and methods for the fabrication of a crossbar array fabrication of resistive random access memory (RRAM) cells. The array structure contains large grain copper and its alloy or silver and its alloy. A metal cap and spacer are used to protect copper or silver from chemical modifications during memory cell patterning.
1. A crossbar array device comprising:
an array of resistive random access memory (RRAM) having respective top portions and respective bottom portions;
a first electrode layer operatively connected to a respective bottom portion of the array of RRAM; and
a second electrode layer operatively connected to a respective top portion of the array of RRAM,
wherein the first electrode layer and the second electrode layer each contain a transition metal containing crystal grains on a sub-micron scale and each RRAM contains a critical dimension that is inversely proportional to a diameter of each crystal grain in the first electrode layer.
2. The crossbar array device of claim 1 , wherein the crystal grains contain patterned lines with grains larger than a critical dimension line.
3. The crossbar array device of claim 1 , wherein the first electrode layer comprises:
a first metal film deposited over a silicon surface;
a first metal cap deposited over the first metal film; and
a first electrode deposited over the first metal cap.
4. The crossbar array device of claim 3 , wherein the first electrode, comprises:
a top portion and a bottom portion, wherein the respective top portion of the first electrode is operatively connected to respective bottom portions of the array of RRAM.
5. The crossbar array device of claim 3 , wherein the first metal film is selected from a group consisting of copper and silver.
6. The crossbar array device of claim 1 , wherein the second electrode layer comprises:
a second metal film deposited over a second electrode;
a second metal cap deposited over the second metal film; and
a hardmask layer deposited over the second metal cap.
7. The crossbar array device of claim 6 , wherein the second electrode, comprises:
a top portion and a bottom portion, wherein the respective bottom portion of the second electrode is operatively connected to respective top portions of the array of RRAM.
8. The crossbar array device of claim 7 , wherein the second metal film is selected from a group consisting of copper and silver.
9. The crossbar array device of claim 6 , wherein a spacer is disposed around the second electrode layer and interfaces with a first dielectric material and a hardmask.
10. The crossbar array device of claim 1 , further comprising:
a second dielectric material operatively connected to the bottom portions of the array of RRAM and the first electrode layer.
11. The crossbar array device of claim 1 , wherein the transition metal in the first electrode layer is equivalent to the transition metal in the second electrode layer.
12. The crossbar array device of claim 1 , wherein the transition metal in the first electrode layer is not equivalent to the transition metal in the second electrode layer.
13. The crossbar array device of claim 1 , wherein the sub-micron scale comprises crystal grains of approximately 10 −6 m.