Semiconductor device, method for manufacturing the same, or display device including the same
To suppress a change in electrical characteristics in a transistor including an oxide semiconductor film. The transistor includes a first gate electrode, a first insulating film, an oxide semiconductor film, a source electrode, a drain electrode, a second insulating film, a second gate electrode, and a third insulating film. The oxide semiconductor film includes a first oxide semiconductor film on the first gate electrode side, and a second oxide semiconductor film over the first oxide semiconductor film. The first oxide semiconductor film and the second oxide semiconductor film include In, M, and Zn (M is Al, Ga, Y, or Sn). In a region of the second oxide semiconductor film, the number of atoms of In is smaller than that in the first oxide semiconductor film. The second gate electrode includes at least one metal element included in the oxide semiconductor film.
1. A semiconductor device comprising:
a transistor including:
a first gate electrode;
a first insulating film over the first gate electrode;
an oxide semiconductor film over the first insulating film;
a source electrode electrically connected to the oxide semiconductor film;
a drain electrode electrically connected to the oxide semiconductor film;
a second insulating film over the oxide semiconductor film;
a second gate electrode over the second insulating film; and
a third insulating film over the second gate electrode,
wherein the oxide semiconductor film includes a first oxide semiconductor film over the first insulating film, and a second oxide semiconductor film over the first oxide semiconductor film,
wherein the second gate electrode includes a third oxide semiconductor film over the second insulating film, and a fourth oxide semiconductor film over the third oxide semiconductor film,
wherein the first oxide semiconductor film, the second oxide semiconductor film, the third oxide semiconductor film, and the fourth oxide semiconductor film include In, Ga, and Zn,
wherein the first oxide semiconductor film includes a region satisfying In>Ga,
wherein the second oxide semiconductor film includes a region satisfying In≤Ga,
wherein the third oxide semiconductor film includes a region satisfying In<Ga, and
wherein the fourth oxide semiconductor film includes a region satisfying In>Ga.
2. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor film includes a crystal part having c-axis alignment.
3. The semiconductor device according to claim 1 ,
wherein the third insulating film includes at least one of hydrogen and nitrogen.
4. A display device comprising:
the semiconductor device according to claim 1 ; and
a display element.
5. A display module comprising:
the display device according to claim 4 ; and
a touch sensor.
6. An electronic device comprising:
the semiconductor device according to claim 1 ; and
at least one of an operation key and a battery.
7. A semiconductor device comprising:
a transistor including:
a first gate electrode;
a first insulating film over the first gate electrode;
an oxide semiconductor film over the first insulating film;
a source electrode electrically connected to the oxide semiconductor film;
a drain electrode electrically connected to the oxide semiconductor film;
a second insulating film over the oxide semiconductor film;
a second gate electrode over the second insulating film; and
a third insulating film over the second gate electrode,
wherein the second gate electrode is electrically connected to the first gate electrode through an opening portion in the first insulating film and the second insulating film,
wherein the oxide semiconductor film includes a first oxide semiconductor film over the first insulating film, and a second oxide semiconductor film over the first oxide semiconductor film,
wherein the second gate electrode includes a third oxide semiconductor film over the second insulating film, and a fourth oxide semiconductor film over the third oxide semiconductor film,
wherein the first oxide semiconductor film, the second oxide semiconductor film, the third oxide semiconductor film, and the fourth oxide semiconductor film include In, Ga, and Zn,
wherein the first oxide semiconductor film includes a region satisfying In>Ga,
wherein the second oxide semiconductor film includes a region satisfying In≤Ga,
wherein the third oxide semiconductor film includes a region satisfying In<Ga, and
wherein the fourth oxide semiconductor film includes a region satisfying In>Ga.
8. The semiconductor device according to claim 7 ,
wherein the oxide semiconductor film includes a crystal part having c-axis alignment.
9. The semiconductor device according to claim 7 ,
wherein the third insulating film includes at least one of hydrogen and nitrogen.
10. A display device comprising:
the semiconductor device according to claim 7 ; and
a display element.
11. A display module comprising:
the display device according to claim 10 ; and
a touch sensor.
12. An electronic device comprising:
the semiconductor device according to claim 7 ; and
at least one of an operation key and a battery.