Physical quantity detection device, electronic apparatus, and moving object
A physical quantity detection device includes a semiconductor element and a physical quantity detection vibrator element a portion of which overlaps the semiconductor element in a plan view of the semiconductor element. The physical quantity detection vibrator element includes a drive portion including a drive electrode, and a detection portion. At least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element.
1. A physical quantity detection device comprising:
a semiconductor element; and
a physical quantity detection vibrator element, a portion of which overlaps the semiconductor element in a plan view of the semiconductor element, wherein
the physical quantity detection vibrator element includes
a drive portion including a drive electrode, and
a detection portion,
at least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element, and
the detection portion overlaps the semiconductor element in the plan view of the semiconductor element.
2. The physical quantity detection device according to claim 1 , wherein
the physical quantity detection vibrator element is disposed on an active surface side of the semiconductor element.
3. The physical quantity detection device according to claim 1 , wherein
the physical quantity detection vibrator element includes
a base portion, and
a support portion extending from the base portion,
the support portion is connected at a fixing position of the semiconductor element, and
the detection portion is disposed between the base portion and the fixing position in the plan view of the semiconductor element.
4. The physical quantity detection device according to claim 1 , wherein
the physical quantity detection vibrator element includes a base portion,
the drive portion includes first and second driving vibrating arms extending from one edge of the base portion, and
the detection portion includes first and second detecting vibrating arms extending from another edge of the base portion on the side opposite to the one edge.
5. An electronic apparatus comprising the physical quantity detection device according to claim 1 .
6. A moving object comprising the physical quantity detection device according to claim 1 .
7. A physical quantity detection device comprising:
a semiconductor element; and
a physical quantity detection vibrator element, a portion of which overlaps the semiconductor element in a plan view of the semiconductor element, wherein
the physical quantity detection vibrator element includes
a drive portion including a drive electrode, and
a detection portion,
at least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element, and
in the plan view of the semiconductor element, the drive portion includes a first drive portion and a second drive portion, and the semiconductor element is disposed between the first drive portion and the second drive portion.
8. An electronic apparatus comprising the physical quantity detection device according to claim 7 .
9. A moving object comprising the physical quantity detection device according to claim 7 .
10. A physical quantity detection device comprising:
a semiconductor element; and
a physical quantity detection vibrator element, a portion of which overlaps the semiconductor element in a plan view of the semiconductor element, wherein
the physical quantity detection vibrator element includes
a drive portion including a drive electrode, and
a detection portion,
at least a partial region of the drive electrode does not overlap the semiconductor element in the plan view of the semiconductor element,
the physical quantity detection vibrator element includes
a base portion,
a first coupling portion extending from the base portion along a first direction, and
a second coupling portion extending from the base portion along a direction opposite to the first direction,
the drive portion includes
a first driving vibrating arm extending from the first coupling portion along a second direction intersecting the first direction,
a second driving vibrating arm extending from the first coupling portion along a direction opposite to the second direction,
a third driving vibrating arm extending from the second coupling portion along the second direction, and
a fourth driving vibrating arm extending from the second coupling portion along the direction opposite to the second direction, and
the detection portion includes
a first detecting vibrating arm extending from the base portion along the second direction, and
a second detecting vibrating arm extending from the base portion along the direction opposite to the second direction.
11. An electronic apparatus comprising the physical quantity detection device according to claim 10 .
12. A moving object comprising the physical quantity detection device according to claim 10 .