Phase change memory structure and manufacturing method for the same
View Patent ↗Present disclosure provides a phase change memory structure, including a transistor region, a phase change material over the transistor region, a heater over the transistor region and in contact with the phase change material, and a dielectric layer surrounding the heater and the phase change material. The heater includes a first material having a first thermal conductivity, the first material disposed at a periphery of the heater, and a second material having a second thermal conductivity greater than the first thermal conductivity, the second material disposed at a center of the heater. Present disclosure also provides a method for manufacturing the phase change memory structure described herein.
1. A phase change memory structure, comprising:
a transistor region;
a phase change material over the transistor region;
a heater over the transistor region and in contact with the phase change material, the heater comprising:
a first material having a first thermal conductivity, the first material disposed at a periphery of the heater; and
a second material having a second thermal conductivity greater than the first thermal conductivity, the second material disposed at a center of the heater; and
a dielectric layer surrounding the heater and the phase change material,
wherein the phase change material is in direct contact with the second material.
2. The phase change memory structure of claim 1 , wherein the heater is in contact with the phase change material at a first surface comprising the first material and the second material.
3. The phase change memory structure of claim 2 , the heater further comprising a second surface opposite to the first surface, the second surface comprising only the first material.
4. The phase change memory structure of claim 1 , the heater further comprising a third material having a third thermal conductivity lower than the second thermal conductivity, the third material being in contact with the phase change material.
5. The phase change memory structure of claim 4 , wherein the third material comprises graded oxygen derivatives of the first material and the second material.
6. The phase change memory structure of claim 1 , further comprising a fourth material having a fourth thermal conductivity, disposed between the first material and the second material.
7. The phase change memory structure of claim 6 , wherein the first material and the fourth material comprise a superlattice structure.
8. The phase change memory structure of claim 1 , wherein the heater is a bottom electrode.
9. The phase change memory structure of claim 1 , wherein the heater is a top electrode.
10. The phase change memory structure of claim 1 , wherein the heater is a bottom electrode contact.
11. A semiconductor device, comprising:
a transistor;
a first metallization layer over the transistor;
a phase change material over the first metallization layer;
a second metallization layer over the phase change material;
a dielectric layer between the first metallization layer and the second metallization layer, surrounding the phase change material; and
a heater in the dielectric layer and in contact with the phase change material; and
wherein the heater comprises a heat insulation shell and a heat conducting core, the heat insulation shell obstructing heat dissipation from the heat conducting core.
12. The semiconductor device of claim 11 , wherein the heat insulation shell and the heat conducting core are both in contact with the phase change material.
13. The semiconductor device of claim 11 , wherein the first metallization layer comprises a bottom electrode for the phase change material and the heater is a contact extending from the bottom electrode to a bottom of the phase change material.
14. The semiconductor device of claim 13 , further comprising a top electrode in contact with the phase change material and being surrounded by the dielectric layer.
15. The semiconductor device of claim 13 , wherein the second metallization layer comprises a top electrode in contact with the phase change material.
16. The semiconductor device of claim 11 , wherein a portion of the heat insulation shell in contact with the phase change material comprises oxynitrides.
17. The semiconductor device of claim 11 , wherein the heat insulation shell comprises superlattice structure.
18. A method for manufacturing a phase change memory structure, comprising:
forming a bottom electrode;
forming a dielectric layer over the bottom electrode, the dielectric layer patterned with a contact trench;
depositing a heat insulation layer having an effective first thermal conductivity in a sidewall and a bottom of the contact trench;
filling the contact trench with a heat conductive material having a second thermal conductivity greater than the effective first thermal conductivity;
planarizing the first material, the second material, and the dielectric layer to form a coplanar surface of the first material, the second material, and the dielectric layer;
oxidizing the coplanar surface to obtain oxygen derivatives of the first material and the second material before forming the phase change material; and
forming a phase change material over and in contact with the coplanar surface.
19. The method of claim 18 , wherein the depositing the heat insulation layer comprises forming a superlattice structure.
20. The method of claim 18 , wherein forming the bottom electrode comprises forming a first metallization layer.