Method for producing a sensor element by means of laser structuring

1. A method for producing a sensor element ( 10 ) for a pressure or force sensor, comprising:

a) providing a component ( 13 ) to be deformed;

b) applying to the component ( 13 ) a sensor function and contact layer ( 24 ) consisting of a material with a k-factor between 2 and 10; and

c) planar ablation of the material of the sensor function and contact layer ( 24 ) by means of a laser, in such a manner that strain gauges ( 44 ) with a resistance structure with a meandering shape and contact pads ( 46 . 1 , 46 . 2 , 46 . 3 , 46 . 4 ) remain standing,

wherein for ablating the material, laser pulses selected from a group consisting of laser pulses in the sub-picosecond range, laser pulses from a broadband laser source ( 28 ) with a wavelength bandwidth of 10 nm to 70 nm, laser pulses from a broadband laser source ( 28 ) with a fundamental wavelength and a wavelength bandwidth that is greater than or equal to 1% of the fundamental wavelength, laser pulses compressed by a pulse compression process, and laser pulses conducted through a hollow-core fiber are used.

2. The method according to claim 1 , wherein the step c) includes:

ablation of the material in such a manner that the surface area occupied by the contact pads ( 46 . 1 , 46 . 2 , 46 . 3 , 46 . 4 ) is equal to or smaller than the resistance structure surface area situated within an outer peripheral line around the resistance structure.

3. The method according to claim 1 or 2 , wherein the step c) includes:

ablation of the material in such a manner that conductive paths ( 40 ) with a meandering shape, which form resistances (R 1 -R 4 ) of the resistance structure with a meandering shape, have a width of less than 100 μm.

4. The method according to claim 1 , wherein the step c) includes:

ablation of material for producing a provisional resistance of the resistance structure, measuring the electrical resistance of the provisional resistance and further ablation of material from the provisional resistance when the measured electrical resistance is lower than a target resistance, and stopping the ablation of material when the measured electrical resistance is equal to or greater than the target resistance.

5. The method according to claim 1 , wherein the step a) includes:

providing a metallic substrate ( 16 ) or a steel substrate and producing the component ( 13 ) from the metallic substrate ( 16 ) or the steel substrate.

6. The method according to claim 1 , further including, between the step a) and the step b):

applying an electrically insulating insulation layer ( 22 ) to the component ( 13 ),

wherein the step b) includes:

applying the sensor function and contact layer ( 24 ) to the electrically insulating insulation layer ( 22 ) covering the component ( 13 ).

7. The method according to claim 6 , wherein the step c) includes:

use of laser pulses with a pulse length τ p , wherein

τ

p

≤

2

⁢

⁢

hn

c

0

wherein

τ p is a pulse duration,

h is a layer thickness of the insulator layer,

c 0 is a speed of light in vacuum, and

n is a refractive index.

8. The method according to claim 1 , wherein the step c) includes:

ablation of the material between the edge of the component ( 13 ) and the material structure that remains standing and contains the resistance structure and the contact pads ( 46 . 1 , 46 . 2 , 46 . 3 , 46 . 4 ), in such a manner that an electrical high-voltage dielectric strength that is greater than or equal to 50 VAC is provided between the material structure that remains standing and the edge.

9. The method according to claim 1 , wherein the step c) includes:

use of an femtosecond (fs) laser source ( 28 ) with a power of 100-300 nJ, a wavelength of 480 nm to 1500 nm, pulse widths of 5 fs to 300 fs, and a bandwidth between 10 nm and 70 nm.

10. The method according to claim 1 , wherein the step b) includes:

applying NiCr or NiCr and Ni or TiON as a material for forming the sensor function and contact layer ( 24 ), respectively.

11. The method according to claim 1 , wherein the step c) includes:

scanning the surface to be ablated with such a speed that step c) is carried out in less than 1 second.

12. The method according to claim 1 , wherein the step a) includes:

providing a membrane ( 14 ) as a component ( 13 ).

13. A sensor element ( 10 ) obtained by a method according to claim 1 .

14. A sensor for measuring pressure or force, comprising a sensor element ( 10 ) according to claim 13 .