Pattern forming method, semiconductor device, and manufacturing method thereof
According to one embodiment, a pattern forming method includes forming a resist pattern on a substrate, forming a first silicone resin layer so as to bury the resist pattern on the substrate, pressing a film on the surface of the first silicone resin layer to adhere the film thereto, curing the first silicone resin layer after the adhesion of the film, peeling the film from the first silicone resin layer before or after the curing of the first silicone resin layer, and removing the resist pattern after the peeling of the film.
1. A pattern forming method, comprising:
forming a resist pattern on a substrate;
forming a silicone resin layer which is ultraviolet-cured on the substrate with the resist pattern formed thereon;
selectively irradiating ultraviolet on the silicone resin layer, the ultraviolet not being irradiated at least on a region corresponding to the resist pattern, to cure the irradiated area;
removing an uncured part of the silicone resin layer by a developer; and
removing the resist pattern through a part where the silicon resin layer is removed.
2. The method of claim 1 , wherein the resist pattern is formed as a reverse pattern of a part where a convex bank structure is to be formed.
3. The method of claim 2 , wherein the resist pattern is formed as pattern for a channel on the substrate, and the ultraviolet is not irradiated on a part corresponding to an opening connected to the channel.
4. The method of claim 2 , wherein, after the forming of the resist pattern and before the forming of the silicone resin layer, a protection film is formed to cover the resist pattern, and, after the removing of the uncured part of the silicone resin layer by the developer and before the removing of the resist pattern, the protection film is selectively etched using the silicon resin layer as a mask.
5. The method of claim 1 , wherein the developer includes at least one of diisopropylamine, triethylamine, pentane, perfluorotributylamine, perfluorodecalin, xylene, ether, hexane, trichloroethylene, normal heptane, cyclohexane, dimethoxyethane, toluene, ethyl acetate, and ethyl methyl ketone, as a solvent.