IP Library › Granted Patent US 10,381,476

Granted Patent B2

US 10,381,476 · App. 16/000,264 · Granted Aug 13, 2019

Vertical transport fin field effect transistors on a substrate with varying effective gate lengths

Inventors: Zhenxing Bi (Niskayuna, NY); Kangguo Cheng (Schenectady, NY); Juntao Li (Cohoes, NY); Peng Xu (Guilderland, NY)

Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION

H01L29/7827 H01L21/3086 H01L21/76224 H01L21/823412 H01L21/823418 H01L21/823487 H01L27/088 H01L29/0649 H01L29/0847 H01L29/1037 H01L29/6656 H01L29/66666 H01L29/785 H01L21/823481

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Quick Facts

Patent No.: US 10,381,476
App. No.: 16/000,264
Granted: Aug 13, 2019
Kind: B2

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USPTO Patent Center↗ Full Patent PDF↗

Abstract

A method of forming vertical transport fin field effect transistors, including, forming a bottom source/drain layer on a substrate, forming a channel layer on the bottom source/drain layer, forming a recess in the channel layer on a second region of the substrate, wherein the bottom surface of the recess is below the surface of the channel layer on a first region, forming a top source/drain layer on the channel layer, where the top source/drain layer has a greater thickness on the second region of the substrate than on the first region of the substrate, and forming a vertical fin on the first region of the substrate, and a vertical fin on the second region of the substrate, wherein a first top source/drain is formed on the vertical fin on the first region, and a second top source/drain is formed on the vertical fin on the second region.

Claims (42)

1. A plurality of vertical transport fin field effect transistors on a substrate, comprising:

a bottom source/drain layer on a substrate, wherein the bottom source/drain layer covers a first region of the substrate and an adjoining second region of the substrate;

at least one vertical fin on the bottom source/drain layer on the first region of the substrate;

at least one vertical fin on the bottom source/drain layer on the second region of the substrate;

a first top source/drain having a height, H 1 , on the at least one vertical fin on the first region of the substrate; and

a second top source/drain having a height, H 2 , on the at least one vertical fin on the second region of the substrate, wherein the height, H 2 , of the second top source/drain is greater than the height, H 1 , of the first top source/drain.

2. The plurality of vertical transport fin field effect transistors on a substrate of claim 1 , wherein the at least one vertical fin on the first region of the substrate and the at least one vertical fin on the second region of the substrate are intrinsic silicon.

3. The plurality of vertical transport fin field effect transistors on a substrate of claim 2 , wherein the bottom source/drain layer and the first top source/drain are doped to form a n-type or p-type vertical transport fin field effect transistor, and the second top source/drain is doped to form a vertical transport fin field effect transistor of the same polarity as the first top source/drain.

4. The plurality of vertical transport fin field effect transistors on a substrate of claim 2 , wherein the height, H 2 , of the second top source/drain is greater than the height, H 1 , of the first top source/drain by about 1 nm to about 10 nm.

5. The plurality of vertical transport fin field effect transistors on a substrate of claim 2 , further comprising:

a bottom spacer on the bottom source/drain layer;

a gate structure on the at least one vertical fin on the first region of the substrate; and

a gate structure on the at least one vertical fin on the second region of the substrate, wherein the gate structure on the at least one vertical fin on the second region of the substrate overlaps at least a portion of the second top source/drain on the at least one vertical fin on the second region of the substrate.

6. The plurality of vertical transport fin field effect transistors on a substrate of claim 5 , further comprising an isolation trench that extends through the bottom spacer and bottom source/drain layer into the substrate to physically and electrically separate the gate structure and the at least one vertical fin on the first region of the substrate from the gate structure and the at least one vertical fin on the second region of the substrate.

7. The plurality of vertical transport fin field effect transistors on a substrate of claim 1 , wherein the first top source/drain having a height, H 1 , in a range of about 10 nm to about 50 nm.

8. The plurality of vertical transport fin field effect transistors on a substrate of claim 7 , wherein the second top source/drain has a height, H 2 , in a range of about 11 nm to about 60 nm.

9. The plurality of vertical transport fin field effect transistors on a substrate of claim 8 , wherein the height, H 2 , of the second top source/drain is greater than the height, H 1 , of the first top source/drain by about 1 nm to about 10 nm.

10. A plurality of vertical transport fin field effect transistors on a substrate, comprising:

a bottom source/drain layer on a substrate, wherein the bottom source/drain layer covers a first region of the substrate and an adjoining second region of the substrate, wherein the bottom source/drain layer includes an n-type dopant;

at least one vertical fin on the bottom source/drain layer on the first region of the substrate;

at least one vertical fin on the bottom source/drain layer on the second region of the substrate;

a first top source/drain having a height, H 1 , on the at least one vertical fin on the first region of the substrate; and

a second top source/drain having a height, H 2 , on the at least one vertical fin on the second region of the substrate, wherein the combined height of the first top source/drain, the at least one vertical fin on the first region of the substrate, and the bottom source/drain layer is the same as the combined height of the second top source/drain, the at least one vertical fin on the second region of the substrate, and the bottom source/drain layer, and the height, H 2 , of the second top source/drain is greater than the height, H 1 , of the first top source/drain.

11. The plurality of vertical transport fin field effect transistors on a substrate, of claim 10 , wherein the height, H 2 , of the second top source/drain is greater than the height, H 1 , of the first top source/drain by about 1 nm to about 10 nm.

12. The plurality of vertical transport fin field effect transistors on a substrate, of claim 11 , wherein the thickness of the bottom source/drain layer is in a range of about 10 nm to about 50 nm.

13. The plurality of vertical transport fin field effect transistors on a substrate, of claim 12 , wherein the at least one vertical fin on the first region of the substrate has a height in a range of about 30 nm to about 125 nm.

14. The plurality of vertical transport fin field effect transistors on a substrate, of claim 13 , wherein the at least one vertical fin on the second region of the substrate has a height in a range of about 20 nm to about 124 nm.

15. The plurality of vertical transport fin field effect transistors on a substrate of claim 14 , further comprising:

a bottom spacer on the bottom source/drain layer;

a gate structure on the at least one vertical fin on the first region of the substrate; and

16. A plurality of vertical transport fin field effect transistors on a substrate, comprising:

at least one vertical fin on the bottom source/drain layer on the first region of the substrate, wherein the at least one vertical fin on the first region of the substrate has a height in a range of about 30 nm to about 125 nm;

at least one vertical fin on the bottom source/drain layer on the second region of the substrate, wherein the at least one vertical fin on the second region of the substrate has a height in a range of about 20 nm to about 124 nm;

a first top source/drain having a height, H 1 , on the at least one vertical fin on the first region of the substrate;

a bottom spacer on the bottom source/drain layer; and

17. The plurality of vertical transport fin field effect transistors on a substrate of claim 16 , further comprising a gate dielectric layer on the bottom spacer layer, the at least one vertical fin on the first region of the substrate, and the at least one vertical fin on the second region of the substrate.

18. The plurality of vertical transport fin field effect transistors on a substrate of claim 17 , further comprising a work function layer on the gate dielectric layer.

19. The plurality of vertical transport fin field effect transistors on a substrate of claim 18 , wherein the first top source/drain and second top source/drain are enlarged top source/drains.

20. The plurality of vertical transport fin field effect transistors on a substrate of claim 19 , wherein the first top source/drain has a height, H 1 , in a range of about 10 nm to about 50 nm, and the second top source/drain has a height, H 2 , in a range of about 11 nm to about 60 nm.

Assignments (1)

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 6, 2018

From: BI, ZHENXING; CHENG, KANGGUO; LI, JUNTAO; XU, PENG

To: INTERNATIONAL BUSINESS MACHINES CORPORATION

Reel/Frame 046003/0560 →

Continuity (2)

Division 15463314 · Mar 20, 2017

Related Publication 20180294352A1 · Oct 11, 2018

Cited By (1)

US 12,255,099