IP Library › Granted Patent US 10,385,443
Granted Patent B2
US 10,385,443 · App. 15/353,000 · Granted Aug 20, 2019

Device for growing monocrystalline crystal

Inventors: Dai-Liang Ma (Taoyuan, TW); Hsueh-I Chen (Taoyuan, TW); Bo-Cheng Lin (Taoyuan, TW); Cheng-Jung Ko (Taoyuan, TW); Ying-Cong Zhao (Taoyuan, TW); Chih-Wei Kuo (Taoyuan, TW); Shu-Yu Yeh (Taoyuan, TW)
Assignee: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
C23C14/243C23C14/0635C23C14/0641C23C14/26C30B23/00C30B23/002C30B23/025C30B23/06C30B23/066C30B29/36C30B29/403
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Quick Facts
Patent No.
US 10,385,443
App. No.
15/353,000
Granted
Aug 20, 2019
Kind
B2
Abstract

A device for growing large-sized monocrystalline crystals, including a crucible adapted to grow crystals from a material source and with a seed crystal and including therein a seed crystal region, a growth chamber, and a material source region; a thermally insulating material disposed outside the crucible and below a heat dissipation component; and a plurality of heating components disposed outside the thermally insulating material to provide heat sources, wherein the heat dissipation component is of a heat dissipation inner diameter and a heat dissipation height which exceeds a thickness of the thermally insulating material.

Claims (15)

1. A device for growing monocrystalline crystals, comprising:

a crucible adapted to grow crystals from a material source and with a seed crystal and including therein a seed crystal region, a growth chamber, and a material source region;

a thermally insulating material disposed outside the crucible;

a heat dissipation component disposed on top of the crucible; and

a plurality of heating components disposed outside the thermally insulating material to provide heat sources;

wherein the heat dissipation component is a hollow-cored cylinder surrounded by the thermally insulating material and directly contacted with the crucible at the bottom thereof so as to expose at least a part of top surface of the crucible, and the heat dissipation component is of a heat dissipation inner diameter and a heat dissipation height which exceeds a thickness of the thermally insulating material.

2. The device of claim 1 , wherein the crucible is a graphite crucible.

3. The device of claim 1 , wherein the heat dissipation inner diameter equals one of 10˜250 mm and 1%˜85% of an outer diameter of an upper portion of the crucible.

4. The device of claim 1 , wherein the heat dissipation height equals 5˜200 mm.

5. The device of claim 1 , wherein the heat dissipation component is made of one of a porous, thermally insulating carbon material, a graphite, and a graphite felt.

6. The device of claim 1 , wherein the thermally insulating material is a graphite felt.

7. The device of claim 1 , wherein the material source region contains the material source.

8. The device of claim 1 , wherein the material source is one of a silicon carbide powder and a nitride powder.

9. The device of claim 1 , wherein the heating components are each one of a heating coil and a heating resistance wire/netting.

10. The device of claim 1 , wherein the seed crystal is a monocrystalline wafer of a thickness of at least 350 μm and a diameter of 2-6 inches and is for growing monocrystalline crystals which outgrow the seed crystal in size.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 16, 2016
From: MA, DAI-LIANG; CHEN, HSUEH-I; LIN, BO-CHENG; KO, CHENG-JUNG; ZHAO, YING-CONG; KUO, CHIH-WEI; YEH, SHU-YU
To: NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
Reel/Frame 040344/0344 →
Priority Claims (1)
TW 105127344 A · Aug 26, 2016 · national
Continuity (1)
Related Publication 20180057925A1 · Mar 1, 2018