Device for controlling a piezoelectric actuator
A device is provided for controlling a piezoelectric actuator able to combine two types of piezoelectric actuator control, namely voltage control and charge control. Switching between charge control and voltage control takes place automatically, without added switching elements, according to the nature of the voltage applied to the input of the setup.
1. A device for controlling a piezoelectric actuator comprising:
an operational amplifier having an inverting input and a non-inverting input, and an output allowing an output voltage to be delivered;
a capacitive circuit comprising a piezoelectric actuator and a capacitor in series, said capacitive circuit being connected by the free end of the piezoelectric actuator to the output of the operational amplifier and by the free end of the capacitor to a low-voltage terminal;
a resistive circuit comprising a first resistor and a second resistor in series, said resistive circuit being connected by the free end of the first resistor to the output of the operational amplifier and by the second resistor to a low-voltage terminal;
the device wherein the inverting input of the operational amplifier is connected to the common ends of the piezoelectric actuator and of the capacitor, and is connected to the common ends of the first and the second resistor, the capacitive circuit and the resistive circuit forming an impedance bridge; and
unidirectional transil diodes that are connected to the terminals of the piezoelectric actuator in order to limit the voltage at said terminals.
2. The device as claimed in claim 1 , wherein the ratio of the impedances of the capacitive circuit is equal to the ratio of the impedances of the resistive circuit.
3. The device as claimed in claim 1 , wherein a control signal at a given frequency applied to the non-inverting input of the operational amplifier allows the piezoelectric actuator to be charge-controlled.
4. The device as claimed in claim 1 , wherein a continuous control signal applied to the non-inverting input of the operational amplifier allows the piezoelectric actuator to be voltage-controlled.
5. The device as claimed in claim 1 , wherein the operational amplifier is supplied with between 60 V and +160 V.
6. The device as claimed in claim 1 , wherein the voltage at the terminals of the piezoelectric actuator is limited to +150 V and −20 V, respectively.
7. The device as claimed in claim 6 , further comprising a resistor that is connected to the output of the operational amplifier in order to limit the current drawn by the piezoelectric actuator.
8. A Fabry-Perot interferometer controlled by a device as claimed in claim 1 .