Electronic device package
An electronic device package includes a substrate, an electronic device, and a first packaging layer. The electronic device and the first packaging layer are disposed on the substrate and the electronic device is located between the substrate and the first packaging layer. The first packaging layer includes a first oxynitride layer and a second oxynitride layer, wherein the second oxynitride layer is located between the first oxynitride layer and the electronic device. A composition of the first oxynitride layer includes SiN x1 O y1 , a composition of the second oxynitride layer includes SiN x2 O y2 , and x1>x2.
1. An electronic device package, comprising:
a substrate;
an electronic device disposed on the substrate; and
a first packaging layer disposed on the substrate, wherein the electronic device is located between the substrate and the first packaging layer, the first packaging layer comprises a first oxynitride layer and a second oxynitride layer, the second oxynitride layer is located between the first oxynitride layer and the electronic device, a composition of the first oxynitride layer comprises SiNx1Oy1, a composition of the second oxynitride layer comprises SiNx2Oy2, and x1>x2, wherein the first oxynitride layer comprises a doping element.
2. The electronic device package of claim 1 , further comprising a second packaging layer disposed on the substrate, wherein the first packaging layer is located between the substrate and the second packaging layer.
3. The electronic device package of claim 2 , wherein the second packaging layer comprises a third oxynitride layer and a fourth oxynitride layer, the fourth oxynitride layer is located between the third oxynitride layer and the first packaging layer, a composition of the third oxynitride layer comprises SiNx3Oy3, a composition of the fourth oxynitride layer comprises SiNx4Oy4, and x3≥x4.
4. The electronic device package of claim 3 , wherein x4≥x2.
5. The electronic device package of claim 3 , wherein in a composition of the fourth oxynitride layer, a content of the N element is 7 at % to 50 at %.
6. The electronic device package of claim 3 , wherein the first oxynitride layer covers a top surface and a side surface of the second oxynitride layer, the fourth oxynitride layer covers a top surface and a side surface of the first oxynitride layer, and the third oxynitride layer covers a top surface and a side surface of the fourth oxynitride layer.
7. The electronic device package of claim 1 , further comprising a surrounding structure layer, wherein the surrounding structure layer is disposed on the substrate, a thickness of the surrounding structure layer is greater than a thickness of the electronic device, and the electronic device is located in a region surrounded by the surrounding structure layer.
8. The electronic device package of claim 7 , wherein a thickness of the first packaging layer is greater than, less than, or equal to the thickness of the surrounding structure layer.
9. The electronic device package of claim 7 , wherein a radial width of the first packaging layer is gradually changed outward from the substrate.
10. The electronic device package of claim 1 , further comprising a cover layer, wherein the electronic device is sandwiched between the substrate and the cover layer, and the cover layer is located between the first package layer and the substrate.
11. The electronic device package of claim 10 , wherein a thickness of the cover layer is in a range of 1 μm to 50 μm.
12. The electronic device package of claim 10 , wherein a refractive index of the cover layer is in a range of 1.4 to 1.8.
13. The electronic device package of claim 1 , wherein a thickness of the first oxynitride layer is less than that of the second oxynitride layer.
14. The electronic device package of claim 1 , wherein a thickness of the first oxynitride layer is 1 nm to 30 nm.
15. The electronic device package of claim 1 , wherein a content of the doping element in the first oxynitride layer exceeds 0 at % to 5 at %.
16. The electronic device package of claim 1 , wherein the doping element comprises hydrogen, nitrogen, oxygen, an inert gas, or a combination thereof.
17. The electronic device package of claim 1 , wherein the first oxynitride layer is in direct contact with the second oxynitride layer.
18. The electronic device package of claim 1 , wherein the first oxynitride layer covers a top surface and a side surface of the second oxynitride layer.
19. The electronic device package of claim 1 , wherein a nitrogen content of the first oxynitride layer is gradually decreased toward the second oxynitride layer.