IP Library › Granted Patent US 10,401,609
Granted Patent B2
US 10,401,609 · App. 15/820,295 · Granted Sep 3, 2019

Embedded pupil function recovery for fourier ptychographic imaging devices

Inventors: Xiaoze Ou (Pasadena, CA); Jaebum Chung (Pasadena, CA); Roarke Horstmeyer (Palo Alto, CA); Guoan Zheng (Vernon, CT); Changhuei Yang (South Pasadena, CA)
Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGY
G02B21/367G02B21/002G02B21/365G02B27/58G06K9/00134G21K7/00
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Quick Facts
Patent No.
US 10,401,609
App. No.
15/820,295
Granted
Sep 3, 2019
Kind
B2
Abstract

Certain aspects pertain to Fourier ptychographic imaging systems, devices, and methods that implement an embedded pupil function recovery.

Claims (52)

1. A method of Fourier ptychographic imaging with embedded pupil function recovery, the method comprising:

(a) receiving image data for a plurality of intensity images of a sample, the intensity images acquired sequentially by a light detector while the sample is being illuminated at different oblique incidence angles and the light detector is receiving light issuing from the illuminated sample through an optical system having a lens;

(b) Fourier transforming the image data;

(c) simultaneously updating a pupil function of the optical system and a sample spectrum, wherein the sample spectrum is updated in overlapping regions with the Fourier-transformed intensity image data, and the overlapping regions correspond to the different oblique illumination angles; and

(d) inverse Fourier transforming the updated sample spectrum to determine an image of the sample having a higher resolution than the plurality of intensity images.

2. The method of claim 1 , wherein each of the overlapping regions has an area corresponding to the numerical aperture of the lens.

3. The method of claim 2 , wherein the lens is an objective lens, wherein the overlapping regions are in the form of circular pupil apertures.

4. The method of claim 3 , wherein the numerical aperture of the lens is in a range between about 0.02 and about 0.13.

5. The method of claim 3 , wherein the numerical aperture of the lens is about 0.08.

6. The method of claim 2 , further comprising calculating an aberration in the optical system using the updated pupil function.

7. The method of claim 6 , further comprising adaptively correcting an incident wavefront based on the calculated aberration.

8. The method of claim 6 , further comprising determining a substantially aberration-free image of the sample using the calculated aberration.

9. The method of claim 6 , further comprising re-focusing the sample using the calculated aberration.

10. The method of claim 2 , wherein adjacent overlapping regions overlap in area by between 20% and 90%.

11. The method of claim 1 , repeating (c) until the updated sample spectrum is self-consistent.

12. A method of Fourier ptychographic imaging with embedded pupil function recovery, the method comprising:

receiving image data for a plurality of intensity images of a sample, the intensity images acquired sequentially by a light detector while the sample is being illuminated at different oblique incidence angles and the light detector is receiving light issuing from the illuminated sample through an optical system having a lens;

Fourier transforming the image data;

simultaneously updating a pupil function of the optical system and a sample spectrum, wherein the sample spectrum is updated in overlapping regions with the Fourier-transformed intensity image data, and the overlapping regions correspond to the different oblique illumination angles; and

calculating an aberration in the optical system using the updated pupil function.

13. The method of claim 12 , further comprising decomposing a phase component of the updated pupil function into coefficients of Zernike polynomials.

14. The method of claim 13 , further comprising determining wavefront aberration based on coefficients of lower order modes of Zernike polynomials.

15. The method of claim 13 , further comprising determining wavefront aberration based on coefficients of or one or more of a mode associated with defocus aberration, a mode associated with a stigmatism in the x-direction, and a mode associated with a stigmatism in one or two directions.

16. The method of claim 13 , further comprising determining coma aberration based on coefficients of one or more modes of Zernike polynomials.

17. The method of claim 12 , further comprising adaptively correcting an incident wavefront based on the calculated aberration.

18. The method of claim 12 , further comprising inverse Fourier transforming the updated sample spectrum to determine an image of the sample having a higher resolution than the plurality of intensity images.

19. The method of claim 18 , further comprising determining a substantially aberration-free image of the sample using the calculated aberration.

20. The method of claim 18 , further comprising: decomposing a phase component of the updated pupil function to determine a coefficient of a mode associated with defocus aberration; calculating defocus aberration from the coefficient; and re-focusing the higher resolution image of the sample using the calculated defocus aberration.

21. A Fourier ptychographic imaging system employing embedded pupil function recovery, comprising: a variable illuminator configured to illuminate a sample being imaged at a plurality of oblique illumination angles; an optical system having an objective lens configured to collect light issuing from the illuminated sample; a radiation detector configured to receive light issuing from the illuminated sample and transmitted by the optical system, and configured to acquire a plurality of intensity images based on the light received; a processor configured to: simultaneously update a pupil function and a separate sample spectrum, wherein the sample spectrum is updated in overlapping regions with the Fourier-transformed intensity image data, and the overlapping regions correspond to the different oblique illumination angles; and calculate an aberration in the optical system using the updated pupil function.

22. The Fourier ptychographic imaging system of claim 20 , further comprising a wavefront modulator configured to adaptively correct an incident wavefront based on the calculated aberration.

23. The Fourier ptychographic imaging system of claim 20 , wherein the objective lens has a numerical aperture between about 0.02 and 0.13.

24. The Fourier ptychographic imaging system of claim 20 , wherein the objective lens has a numerical aperture numerical aperture of about 0.08.

25. The Fourier ptychographic imaging system of claim 20 , wherein the variable illuminator comprises a circular array of discrete light elements.

26. The Fourier ptychographic imaging system of claim 20 , wherein the processor is further configured to decompose a phase component of the updated pupil function into coefficients of Zernike polynomials.

27. The Fourier ptychographic imaging system of claim 25 , wherein the processor is further configured to determine wavefront aberration based on coefficients of or one or more of a mode associated with defocus aberration, a mode associated with a stigmatism in the x- direction, and a mode associated with a stigmatism in one or two directions.

28. The Fourier ptychographic imaging system of claim 25 , wherein the processor is further configured to determine coma aberration based on coefficients of one or more modes of Zernike polynomials.

29. The Fourier ptychographic imaging system of claim 27 , wherein the processor is further configured to determine coma aberration based on coefficients of one or more modes of Zernike polynomials.

30. The Fourier ptychographic imaging system of claim 20 , wherein the processor is further configured to inverse transform the updated sample spectrum to determine an image of the sample, wherein the image has a higher resolution than the captured intensity images.

31. The Fourier ptychographic imaging system of claim 27 , wherein the processor is further configured to determine a substantially aberration-free image of the sample using the calculated aberration.

32. The Fourier ptychographic imaging system of claim 27 , wherein the processor is further configured to:

decompose a phase component of the updated pupil function to determine a coefficient of a mode associated with defocus aberration;

calculate defocus aberration from the coefficient; and

re-focus the higher resolution image of the sample using the calculated defocus aberration.

33. A method of Fourier ptychographic imaging with embedded pupil function recovery, the method comprising:

providing plane wave illumination at a plurality of oblique incidence angles to a sample being imaged;

collecting light issuing from the sample using an optical system having a lens;

acquiring a plurality of intensity images of the sample using a radiation detector;

simultaneously updating a pupil function of the optical system and a separate sample spectrum, wherein the sample spectrum is updated in overlapping regions with Fourier transformed intensity image data, wherein the overlapping regions corresponds to the plurality of oblique incidence angles; and

inverse Fourier transforming the recovered sample spectrum to recover an image with a higher resolution than the acquired intensity images.

34. The method of claim 33 , further comprising determining an aberration from the updated pupil function.

35. The method of claim 34 , further comprising adaptively correcting for the determined aberration using a wavefront modulator.

36. The method of claim 34 , wherein the overlapping regions overlap by between 20% and 90% in area.

Continuity (12)
Continuation 14572493 · Dec 16, 2014
Continuation In Part 14065280 · Oct 28, 2013
Continuation In Part 14466481 · Aug 22, 2014
Provisional Application 61720258 · Oct 30, 2012
Provisional Application 61847472 · Jul 17, 2013
Provisional Application 61968833 · Mar 21, 2014
Provisional Application 61944380 · Feb 25, 2014
Provisional Application 61916981 · Dec 17, 2013
Provisional Application 61899715 · Nov 4, 2013
Provisional Application 61868967 · Aug 22, 2013
Provisional Application 62000722 · May 20, 2014
Related Publication 20180088309A1 · Mar 29, 2018
Cited By (3)
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