Chip antenna, electronic component, and method for producing same
A chip antenna comprising at least one emitter which extends parallel to a main surface of a semiconductor substrate supporting the chip antenna, wherein the emitter is arranged on an island-like support zone of the semiconductor substrate, the support zone being surrounded by at least one trench which is completely filled with a gas, the trench passing through the entire depth of the semiconductor substrate and being bridged by at least one retaining web which forms a supporting connection between the support zone and the rest of the semiconductor substrate.
1. A chip antenna comprising at least one emitter which extends parallel to a main surface of a semiconductor substrate formed of a semiconductor material, said semiconductor substrate supporting the chip antenna,
wherein the semiconductor substrate comprises at least one island-like support zone and at least one retaining web, and wherein the emitter is arranged on the island-like support zone of the semiconductor substrate,
wherein the island-like support zone is formed by at least one trench which surrounds the island-like support zone and is completely filled with a gas, said support zone and trench passing through the entire depth of the semiconductor substrate,
and wherein the at least one retaining web bridges between the at least one trench to form a supporting connection between the support zone and the rest of the semiconductor substrate.
2. The chip antenna according to claim 1 , wherein the emitter is arranged above the semiconductor substrate in a conductor path stack containing at least one metal level.
3. The chip antenna according to claim 1 , wherein different emitters of the antenna are each arranged at different levels in the same island-like isolated area.
4. The chip antenna according to claim 1 , said chip antenna comprising at least two emitters which are arranged on different island-like support zones and are connected electrically conductively to each other.
5. The chip antenna according to claim 3 , wherein at least a first one of the emitters is arranged on a front side of the semiconductor substrate and at least a second one of the emitters is arranged on an underside of the semiconductor substrate.
6. The chip antenna according to claim 1 , wherein at each emitter edge point facing the surrounding trench there is a perpendicular distance of between 100 and 150 microns to a trench edge facing the emitter.
7. The chip antenna according to claim 1 , wherein the trench has a lateral extension of between 150 and 300 microns.
8. The chip antenna according to claim 1 , wherein the retaining web has a lateral extension transverse to its longitudinal direction of between 80 and 120 microns.
9. The chip antenna according to claim 1 , wherein the semiconductor substrate is fixed by its underside to a circuit board.
10. The chip antenna according to claim 1 , wherein the semiconductor substrate has a reflector on its underside and has a thickness in the depth direction, wherein a wave generated by the antenna and running in the substrate and reflected at the underside of the semiconductor substrate interferes constructively with a non-reflected wave generated by the antenna and running in the substrate.
11. The chip antenna according to claim 1 , wherein the semiconductor substrate is a silicon substrate or a gallium arsenide substrate or an indium phosphide substrate or a gallium nitride substrate or a sapphire substrate or a glass substrate.
12. An electronic component, comprising a chip antenna according to claim 1 and at least one electronic circuit which is electrically connected to the chip antenna.
13. The electronic component according to claim 12 , wherein the electronic circuit is monolithically integrated in the semiconductor substrate.
14. The electronic component according to claim 12 , wherein the electronic circuit is arranged in a second semiconductor substrate connected as a system-in-package to the first semiconductor substrate in a common package.
15. A method for manufacturing a chip antenna with at least one emitter which extends parallel to a main surface of a semiconductor substrate formed of a semiconductor material, the method comprising the steps of
producing an island-like support zone in the semiconductor substrate by fabricating at least one retaining web and by fabricating at least one trench which surrounds the island-like support zone and which is completely filled with gas,
wherein the support zone and the trench pass through the entire depth of the semiconductor substrate and wherein the at least one retaining web bridges the trench to form a supporting connection between the support zone and the remaining area of the semiconductor substrate, and
producing the chip antenna with at least one emitter which extends parallel to a main surface of the semiconductor substrate supporting the chip antenna in the island-like support zone,
wherein the trench is formed either before or after the chip antenna is produced.