Structure and formation method of semiconductor device structure with nanowire
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a substrate including a first fin portion and a first nanowire over the first fin portion. The first nanowire has a polygonal cross-section. The semiconductor device structure also includes a first gate structure surrounding the first nanowire, and two first source/drain portions adjacent to the first nanowire.
1. A semiconductor device structure, comprising:
a substrate comprising a first fin portion;
a first nanowire over the first fin portion, wherein the first nanowire has a polygonal cross-section;
a first gate structure surrounding the first nanowire; and
two first source/drain portions adjacent to the first nanowire, wherein the first nanowire comprises:
two first edge portions adjacent to the two first source/drain portions respectively; and
a first central portion between the two first edge portions,
wherein the two first edge portions have a hexagonal cross-section, and the first central portion has a quadrilateral cross-section.
2. The semiconductor device structure as claimed in claim 1 , wherein the substrate further comprises a second fin portion adjacent to the first fin portion, wherein the semiconductor device structure further comprises:
a second nanowire over the second fin portion, wherein the second nanowire is made of a different material than that of the first nanowire, and the second nanowire has a polygonal cross-section;
a second gate structure surrounding the second nanowire; and
two second source/drain portions adjacent to the second nanowire.
3. The semiconductor device structure as claimed in claim 2 , wherein the second nanowire comprises:
two second edge portions adjacent to the two second source/drain portions respectively; and
a second central portion between the two second edge portions,
wherein the two second edge portions have a hexagonal cross-section, and the second central portion has a quadrilateral cross-section.
4. The semiconductor device structure as claimed in claim 2 , wherein the second gate structure comprises:
a second gate dielectric layer surrounding the second nanowire; and
a second gate electrode surrounding the second gate dielectric layer.
5. The semiconductor device structure as claimed in claim 2 , wherein the first gate structure is in direct contact with the second gate structure.
6. The semiconductor device structure as claimed in claim 2 , wherein an acute angle between a slanted side of the second nanowire and a direction parallel to a top surface of the first fin portion is in a range from about 40 degrees to about 70 degrees.
7. The semiconductor device structure as claimed in claim 1 , further comprising:
a plurality of first nanowires vertically arranged over the first fin portion, wherein two adjacent first nanowires contact each other.
8. The semiconductor device structure as claimed in claim 1 , further comprising:
a plurality of first nanowires vertically arranged over the first fin portion, wherein two adjacent first nanowires are spaced apart from each other.
9. The semiconductor device structure as claimed in claim 1 , wherein the first nanowire comprises:
a semiconductor material wire; and
a cladding layer surrounding the semiconductor material wire.
10. The semiconductor device structure as claimed in claim 9 , wherein the semiconductor material wire has a thickness that is less than that of the first source/drain portion.
11. The semiconductor device structure as claimed in claim 1 , wherein the first gate structure comprises:
a first gate dielectric layer surrounding the first nanowire; and
a first gate electrode surrounding the first gate dielectric layer.
12. A semiconductor device structure, comprising:
a substrate comprising a fin portion;
a nanowire over the fin portion;
a gate structure surrounding the nanowire; and
two source/drain portions adjacent to the nanowire,
wherein the nanowire comprises:
two edge portions adjacent to the two source/drain portions respectively; and
a central portion between the two edge portions,
wherein the nanowire has a cross-sectional area varying from the edge portion to the central portion, wherein the edge portion has a first cross-sectional area, and the central portion has a second cross-sectional area,
wherein the first cross-sectional area is greater than the second cross-sectional area.
13. The semiconductor device structure as claimed in claim 12 , wherein the two edge portions have a hexagonal cross-section, and the central portion has a quadrilateral cross-section.
14. The semiconductor device structure as claimed in claim 12 , further comprising:
a plurality of nanowires vertically arranged over the fin portion, wherein each two adjacent nanowires are in contact with each other.
15. The semiconductor device structure as claimed in claim 12 , further comprising:
a plurality of nanowires vertically arranged over the fin portion, wherein two adjacent nanowires are spaced apart from each other.
16. A method for forming a semiconductor device structure, comprising:
providing a substrate having a base portion and a fin portion over the base portion, wherein the fin portion has a channel region and a source/drain region;
forming a stack structure over the fin portion, wherein the stack structure comprises a first semiconductor layer and a second semiconductor layer vertically stacked over the fin portion;
forming two source/drain portions in the stack structure at the source/drain region;
removing a portion of the second semiconductor layer in the channel region, wherein a remaining portion of the first semiconductor layer in the channel region forms a semiconductor material wire;
forming a cladding layer surrounding the semiconductor material wire in the channel region to form a nanowire, wherein the nanowire has a polygonal cross-section; and
forming a gate structure surrounding the nanowire.
17. The method as claimed in claim 16 , wherein before forming the cladding layer, the method further comprises:
removing an outer portion of the semiconductor material wire, and leaving a remaining portion of the semiconductor material wire.
18. The method as claimed in claim 17 , wherein the cladding layer surrounds the remaining portion of the semiconductor material wire to form the nanowire.
19. The method as claimed in claim 16 , wherein before forming the source/drain portions, the method further comprises:
forming a dummy gate structure covering the stack structure.
20. The method as claimed in claim 19 , wherein before removing the portion of the second semiconductor layer in the channel region, the method further comprises:
removing the dummy gate structure in the channel region.