Semiconductor device, related manufacturing method, and related electronic device
A semiconductor device may include the following elements: a first substrate; a second substrate; a dielectric layer, which may be positioned between the first substrate and the second substrate and may have a hole; a first conductive member, which may be positioned in the dielectric layer; a second conductive member, which may be positioned in the dielectric layer, may be spaced from the first conductive member, and may be positioned closer to the second substrate than the first conductive member; and a third conductive member, which may contact both the first conductive member and the second conductive member through the hole.
1. A method for manufacturing a semiconductor device, comprising:
providing a first substrate;
providing a second substrate;
providing a first dielectric layer that overlaps the first substrate, wherein a first conductive member is positioned in the first dielectric layer, the first conductive member including:
a conductive material portion, and
a first etch-stop layer, formed over the conductive material portion by a conductive material different from the conductive material portion;
providing a second dielectric layer that overlaps the second substrate, wherein a second conductive member is positioned in the second dielectric layer;
bonding the first dielectric layer and the second dielectric layer to each other to form a combined dielectric layer;
forming a hole in the combined dielectric layer, such that the hole exposes a portion of the first conductive member and exposes a portion of the second conductive member; and
providing at least a conductive material in the hole to form a third conductive member, such that the third conductive member has a first side directly contacting a portion of a top surface of the first etch-stop layer of the first conductive member, has a second side directly contacting a portion of a top surface of the second conductive member, and has a third side directly contacting a sidewall of each of the first etch-stop layer and the conductive material portion of the first conductive member.
2. The method of claim 1 , wherein the third side of the third conductive member is positioned inside the combined dielectric layer and is directly connected to each of the first side of the third conductive member and the second side of the third conductive member.
3. The method of claim 2 , wherein a length of the third side of the third conductive member is less than a total length of the third conductive member in a direction perpendicular to a top surface of the second substrate.
4. The method of claim 1 , further comprising:
providing a diffusion barrier material in the hole to form a diffusion barrier,
wherein
the conductive material is subsequently provided to form a conductive material portion, and
the third conductive member includes the conductive material portion and the diffusion barrier.
5. The method of claim 1 , further comprising:
the first etch-stop layer is positioned between the conductive material portion and the first substrate after the bonding.
6. The method of claim 5 , wherein the third conductive member is formed such that the first etch-stop layer is positioned between the conductive material portion and a portion of the third conductive member.
7. The method of claim 1 , further comprising:
forming the second conductive member such that the second conductive member includes a second conductive material portion and a second etch-stop layer over the second conductive material portion,
wherein
the second conductive material portion is formed of a first conductive material,
the second etch-stop layer is formed of a second conductive material different from the first conductive material, and
the third conductive member is formed such that the third conductive member includes a diffusion barrier and such that the second etch-stop layer is positioned between the second conductive material portion and the diffusion barrier.
8. The method of claim 1 , wherein:
the first and second conductive members are separated from each other by a portion of the first dielectric layer and a portion of the second dielectric layer, in a direction perpendicular to a top surface of one of the first and second substrates.
9. The method of claim 8 , wherein:
a portion of the third conductive member passes through the portion of the first dielectric layer and the portion of the second dielectric layer, that are between the first and second conductive members, in the direction perpendicular to the top surface of one of the first and second substrates.
10. The method of claim 1 , wherein:
the third conductive member has a top surface lower than an interface of the first dielectric layer with the first substrate.
11. The method of claim 1 , wherein:
the third side of the third conductive member directly contacts an entire sidewall of the first conductive member.