Seal ring inductor and method of forming the same
Apparatuses and methods for providing inductance are disclosed. In one embodiment, a method for providing an inductor includes forming an electrical circuit on a substrate, forming a seal ring around the perimeter of the electrical circuit, providing a break in at least one layer of the seal ring, and electrically connecting the seal ring such that the seal ring operates as an inductor.
1. A method of providing a seal ring, comprising:
forming an electrical circuit on a substrate, the electrical circuit including a first capacitor configured to receive a radio frequency (RF) signal generated by the electrical circuit;
forming a seal ring around a perimeter of the electrical circuit;
providing a first break in a first coil in a first conductive layer of the seal ring, the first break defining a first end and a second end of the first coil, the first end of the first coil including a first end of the seal ring;
electrically connecting the first capacitor to an antenna external to the electrical circuit or a first RF circuit external to the electrical circuit; and
electrically connecting the first end of the seal ring to the first capacitor and to the antenna or the first RF circuit such that the seal ring is configured to operate as an inductive component.
2. The method of claim 1 further comprising providing a second break in a second conductive layer of the seal ring, the second break defining a first end and a second end of a second coil.
3. The method of claim 2 further comprising electrically connecting the second end of the first coil to the first end of the second coil.
4. The method of claim 2 wherein the first break and the second break at least partially overlap when the first and second conductive layers are viewed from above the substrate.
5. The method of claim 1 wherein the substrate is a gallium arsenide (GaAs) substrate.
6. The method of claim 1 further comprising electrically connecting a second end of the seal ring to a bias circuit of the first RF circuit such that the seal ring is configured to prevent high frequency signal components of the first RF circuit from reaching the bias circuit.
7. The method of claim 6 further comprising electrically connecting the second end of the seal ring to a ground supply.
8. The method of claim 1 further comprising electrically connecting a pin to a first end of the first capacitor.
9. The method of claim 1 further comprising electrically connecting the seal ring to a second RF circuit such that the first capacitor and the seal ring are configured to filter signals from the first RF circuit to the second RF circuit.
10. The method of claim 1 further comprising electrically connecting a second capacitor to the first capacitor and to the first end of the seal ring.
11. The method of claim 1 further comprising electrically connecting a second RF circuit capacitor to the first capacitor and to a second end of the seal ring.
12. The method of claim 1 further electrically connecting a bonding pad to the first capacitor and to the seal ring so as to provide electrostatic discharge (ESD) protection to the electrical circuit.
13. The method of claim 12 wherein electrically connecting the bonding pad to the first capacitor and to the seal ring includes electrically connecting a first end of the first capacitor to the bonding pad and electrically connecting a second end of the first capacitor to the first end of the seal ring.
14. A method of operating a seal ring, comprising:
providing an integrated circuit (IC) including a substrate, a circuit area disposed on the substrate, and a seal ring disposed on the substrate and surrounding a perimeter of the circuit area, the circuit area including a first capacitor configured to receive a radio frequency (RF) signal generated by the IC and electrically connected to an antenna external to the IC or a first RF circuit external to the IC, the seal ring including a first coil in a first conductive layer, the first coil having a first break defining a first end and a second end of the first coil, the first end of the first coil including a first end of the seal ring, the first end of the seal ring electrically connected to the first capacitor and to the antenna or the first RF circuit; and
operating the seal ring as an inductive component.
15. The method of claim 14 further comprising filtering signals from the first RF circuit to a second RF circuit electrically connected to the seal ring.
16. The method of claim 14 further comprising preventing high frequency signal components of the first RF circuit from reaching a bias circuit of the first RF circuit electrically connected to a second end of the seal ring.
17. The method of claim 14 further comprising electrically connecting a second RF circuit capacitor to the first capacitor and to a second end of the seal ring.
18. A method of operating a seal ring, comprising:
providing a semiconductor die comprising a substrate, a circuit area fabricated on the substrate, and a seal ring fabricated on the substrate, the circuit area including a first capacitor configured to receive a radio frequency (RF) signal generated by the circuit area and electrically connected to an antenna external to the semiconductor die or a first RF circuit external to the semiconductor die, the seal ring including a first coil in a first conductive layer, the first coil having a first break defining a first end and a second end of the first coil, the first end of the first coil including a first end of the seal ring, the first end of the seal ring electrically connected to the first capacitor and to the antenna or the first RF circuit; and
operating the seal ring as an inductive component.
19. The method of claim 18 wherein the first end and the second end of the first coil are separated by a distance in the range of about 10 μm to about 20 μm.
20. The method of claim 18 wherein a distance between the first end and the second end of the first coil is equal to a minimum distance permitted by a processing technology.