Piezoelectric actuator

Inventors: Satoshi Ozawa (Tokyo, JP); Koji Taniwaki (Tokyo, JP); Toshiki Maruyama (Tokyo, JP); Akihiro Takeda (Tokyo, JP)

Assignee: TDK CORPORATION

H01L41/0472 H01L41/083 H02N2/04

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Quick Facts

Patent No.: US 10,439,126
App. No.: 15/417,713
Granted: Oct 8, 2019
Kind: B2

External Links

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Abstract

A piezoelectric actuator includes a piezoelectric element, a connection member of a shaft or weight connected to an element end surface of the piezoelectric element, the other one of the shaft and weight connected to a first end surface constituting an end surface opposing to the element end surface of the piezoelectric element, a wiring portion, and a resin portion. The piezoelectric element forms external electrodes on surfaces thereof, alternately laminates internal electrode layers with piezoelectric layers therebetween, and provides part of the external electrodes on the element end surface. The wiring portion has conductive portions corresponding to the external electrodes. The resin portion fixes the piezoelectric element, the connection member, and the wiring portion so that the element end surface opposes to the connection member with the wiring portion therebetween and that the conductive portions are electrically connected to the external electrodes.

Claims (37)

1. A piezoelectric actuator comprising:

a piezoelectric element forming a pair of external electrodes on surfaces of the piezoelectric element; alternately laminating internal electrode layers electrically connected to the external electrodes with piezoelectric layers therebetween; and providing part of the external electrodes on an element end surface constituting part of the surfaces and an end surface in a lamination direction of the piezoelectric element,

a connection member consisting of one of a shaft and a weight connected to a side of the element end surface of the piezoelectric element,

the other one of the shaft and the weight connected to a side of a first end surface constituting an end surface opposing to the element end surface of the piezoelectric element,

a wiring portion having a pair of conductive portions corresponding to the pair of the external electrodes, and

a resin portion fixing the piezoelectric element, the connection member, and the wiring portion so that the element end surface opposes to the connection member with the wiring portion therebetween and that the conductive portions are electrically connected to the external electrodes.

2. The piezoelectric actuator according to claim 1 , wherein

the external electrodes on the element end surface are formed along a pair of opposing sides of the element end surface.

3. The piezoelectric actuator according to claim 1 , wherein

one of the external electrodes on the element end surface extends from one of a pair of opposing sides of the element end surface to the other side of the pair of the opposing sides, and the other external electrode on the element end surface extends from the other side of the pair of the opposing sides to the one side of the pair of the opposing sides.

4. The piezoelectric actuator according to claim 1 , wherein