Electric connection flexures
Electric connection flexures for moving stages of microelectromechanical systems (MEMS) devices are disclosed. The disclosed flexures may provide an electrical and mechanical connection between a fixed frame and a moving frame, and are flexible in the moving frame's plane of motion. In implementations, the flexures are formed using a process that embeds the two ends of each flexure in the fixed frame and moving frame, respectively.
1. An actuator, comprising:
an outer frame;
an inner frame; and
a flexure electrically and mechanically coupling the outer frame to the inner frame, wherein the flexure comprises at least one of a metal and a metal alloy, wherein the flexure comprises:
a first end embedded in the outer frame;
a second end embedded in the inner frame; and
a body extending from the first end to the second end, wherein the body of the flexure has a V-shape formed by a first straight section extending from the first end at an angle, a second straight section extending from the second end at an angle and coupled to the first straight section, wherein each of the first and second straight sections comprise:
a first thin section extending from a respective end of the flexure;
a thicker section extending from the first thin section; and
a second thin section extending from the thicker section.
2. The actuator of claim 1 , wherein the outer frame and inner frame comprise silicon, wherein the first end is embedded in the silicon of the outer frame, and wherein the second end is embedded in the silicon of the inner frame.
3. The actuator of claim 2 , further comprising: a circuit board and a sensor, wherein the outer frame is bonded on the circuit board, wherein the inner frame is electrically and mechanically coupled to a moving stage including the sensor, and wherein the sensor is electrically connected to the circuit board by the flexure.
4. The actuator of claim 1 , wherein the body of the flexure ranges from about 5 to 50 micrometers in height, about 0.5 to 20 micrometers wide, and about 5 to 500 micrometers in a plane of motion.
5. A metal flexure for a moving platform, comprising:
a first end;
a second end;
a body extending from the first end to the second end, wherein the body is flexible in a plane of motion, wherein the body ranges from about 5 to 50 micrometers in height, about 0.5 to 20 micrometers wide, and about 5 to 500 micrometers in the plane of motion, wherein the body of the flexure has a V-shape formed by a first straight section extending from the first end at an angle, a second straight section extending from the second end at an angle and coupled to the first straight section, wherein each of the first and second straight sections comprise:
a first thin section extending from a respective end of the flexure;
a thicker section extending from the first thin section; and
a second thin section extending from the thicker section.