Semiconductor device
According to one embodiment, the semiconductor body of the first portion includes a first semiconductor part and a second semiconductor part. The first semiconductor part extends in the stacking direction. The second semiconductor part is provided between the first semiconductor part and the first electrode layer, and has an end located closer to the first electrode layer side than the first semiconductor part. The first insulating film of the second portion includes a first insulating part and a second insulating part. The first insulating part extends in the stacking direction. The second insulating part is provided between the first insulating part and the second electrode layer, and has an end located closer to the second electrode layer side than the first insulating part.
1. A semiconductor device comprising:
a stacked body including a plurality of electrode layers stacked with an insulator interposed, a hole extending in a stacking direction of the stacked body through the stacked body; and
a semiconductor body extending in the stacking direction in the hole, a plurality of memory cells being provided at crossing portions of the semiconductor body and the electrode layers;
the electrode layers including a first electrode layer and a second electrode layer,
an outer periphery of the semiconductor body having a first outer periphery facing to the first electrode layer and a second outer periphery facing to the second electrode layer,
a distance from a central axis of the hole to the first outer periphery being smaller than a distance from the central axis to the second outer periphery, the central axis extending along the stacking direction,
a distance between the first outer periphery and the first electrode layer being larger than a distance between the second outer periphery and the second electrode layer.
2. The device according to claim 1 , wherein
the insulator includes a first insulator contiguous above the first electrode layer and a second insulator contiguous below the first electrode layer, the first electrode layer being interposed between the first insulator and the second insulator, and the first outer periphery of the semiconductor body facing to the first insulator and the second insulator, and
the distance between the first outer periphery and the first electrode layer is larger than a distance between the first outer periphery and the first insulator, and a distance between the first outer periphery and the second insulator.
3. The device according to claim 2 , wherein
the first electrode layer has a first inner periphery facing to the semiconductor body, the first insulator has a second inner periphery facing to the semiconductor body, and the second insulator has a third inner periphery facing to the semiconductor body, and
the first inner periphery recedes in a direction away from the semiconductor body than the second inner periphery and the third inner periphery to form a concave portion at a surface of the first inner periphery.
4. The device according to claim 3 , wherein the memory cells include a memory cell provided at a crossing portion of the semiconductor body and the first electrode layer, the memory cell including a charge storage portion disposed in the concave portion.
5. The device according to claim 4 , wherein a plurality of insulating films are provided between the first electrode layer and the semiconductor body.
6. The device according to claim 5 , wherein the insulating films include a stacked film of a silicon oxide film and a film having higher dielectric constant than the silicon oxide film between the first electrode layer and the charge storage portion.
7. The device according to claim 5 , wherein the insulating films include a first film, a second film being a silicon nitride film, and a third film stacked in order from a surface of the first electrode layer between the first electrode layer and the semiconductor body.
8. The device according to claim 1 , wherein an insulating layer including a center portion, an upper side portion, and a lower side portion is provided between the first electrode layer and the semiconductor body, the upper side portion and the lower side portion being connected to the center portion, the center portion extending along a surface of the first electrode layer facing to the first outer periphery of the semiconductor body, the upper side portion extending in a direction from the surface of the first electrode layer toward the first outer periphery of the semiconductor body on an upper side of the center portion in the stacking direction, and the lower side portion extending in a direction from the surface of the first electrode layer toward the first outer periphery of the semiconductor body on a lower side of the center portion in the stacking direction.
9. The device according to claim 1 , wherein
the insulator includes a third insulator contiguous above the second electrode layer and a fourth insulator contiguous below the second electrode layer, the second electrode layer being interposed between the third insulator and the fourth insulator, and
the memory cells include a tunnel insulating film formed along the outer periphery of the semiconductor body, the tunnel insulating film extending in the stacking direction between the semiconductor body and the second electrode layer, between the semiconductor body and the third insulator, and between the semiconductor body and the fourth insulator.
10. The device according to claim 1 , wherein a thickness of the first electrode layer is substantially equal to a thickness of the second electrode layer.
11. A semiconductor device comprising:
a stacked body including a plurality of electrode layers stacked with an insulator interposed and a source-side select gate layer provided below the electrode layers, a hole extending in a stacking direction of the stacked body through the stacked body; and
a semiconductor body extending in the stacking direction in the hole, a plurality of memory cells being provided at crossing portions of the semiconductor body and the electrode layers;
the electrode layers including a first electrode layer and a second electrode layer,
an outer periphery of the semiconductor body having a first outer periphery facing to the first electrode layer and a second outer periphery facing to the second electrode layer,
a distance from a central axis of the hole to the first outer periphery being smaller than a distance from the central axis to the second outer periphery, the central axis extending along the stacking direction,
a distance between the first outer periphery and the first electrode layer being larger than a distance between the second outer periphery and the second electrode layer.
12. The device according to claim 11 , wherein
the insulator includes a first insulator contiguous above the first electrode layer and a second insulator contiguous below the first electrode layer, the first electrode layer being interposed between the first insulator and the second insulator, and the first outer periphery of the semiconductor body facing to the first insulator and the second insulator, and
the distance between the first outer periphery and the first electrode layer is larger than a distance between the first outer periphery and the first insulator, and a distance between the first outer periphery and the second insulator.
13. The device according to claim 12 , wherein
the first electrode layer has a first inner periphery facing to the semiconductor body, the first insulator has a second inner periphery facing to the semiconductor body, and the second insulator has a third inner periphery facing to the semiconductor body, and
the first inner periphery recedes in a direction away from the semiconductor body than the second inner periphery and the third inner periphery to form a concave portion at a surface of the first inner periphery.
14. The device according to claim 13 , wherein the memory cells include a memory cell provided at a crossing portion of the semiconductor body and the first electrode layer, the memory cell including a charge storage portion disposed in the concave portion.
15. The device according to claim 14 , wherein a plurality of insulating films are provided between the first electrode layer and the semiconductor body.
16. The device according to claim 15 , wherein the insulating films include a stacked film of a silicon oxide film and a film having higher dielectric constant than the silicon oxide film between the first electrode layer and the charge storage portion.
17. The device according to claim 15 , wherein the insulating films include a first film, a second film being a silicon nitride film, and a third film stacked in order from a surface of the first electrode layer between the first electrode layer and the semiconductor body.
18. The device according to claim 11 , wherein an insulating layer including a center portion, an upper side portion, and a lower side portion is provided between the first electrode layer and the semiconductor body, the upper side portion and the lower side portion being connected to the center portion, the center portion extending along a surface of the first electrode layer facing to the first outer periphery of the semiconductor body, the upper side portion extending in a direction from the surface of the first electrode layer toward the first outer periphery of the semiconductor body on an upper side of the center portion in the stacking direction, and the lower side portion extending in a direction from the surface of the first electrode layer toward the first outer periphery of the semiconductor body on a lower side of the center portion in the stacking direction.
19. The device according to claim 11 , wherein
the insulator includes a third insulator contiguous above the second electrode layer and a fourth insulator contiguous below the second electrode layer, the second electrode layer being interposed between the third insulator and the fourth insulator, and
the memory cells include a tunnel insulating film formed along the outer periphery of the semiconductor body, the tunnel insulating film extending in the stacking direction between the semiconductor body and the second electrode layer, between the semiconductor body and the third insulator, and between the semiconductor body and the fourth insulator.
20. The device according to claim 11 , wherein a thickness of the first electrode layer is substantially equal to a thickness of the second electrode layer.