Piezoelectric blank, piezoelectric vibration element and piezoelectric vibration device
A crystal blank includes a vibrating arm which extends in a direction intersecting the polarization direction. In at least one of the upper surface and lower surface which are parallel to the direction of extension of the vibrating arm and run along polarization direction, the vibrating arm is provided with two recesses (grooves) in the width direction of the surface thereby having a pair of outer walls which are positioned on the two sides of the two recesses and a middle wall which is positioned between the two recesses. In the middle wall, the apex part is located at a position lower than the apex part of each of the pair of outer walls and is thinner than each of the pair of outer walls at the same heights.
1. A piezoelectric vibration element comprising:
a piezoelectric blank comprising:
an arm part which extends in a direction intersecting the polarization direction, wherein
the arm part comprises a predetermined surface which is parallel to the direction of extension of the arm part and runs along the polarization direction and is provided with two or more recesses in the width direction of the predetermined surface, thereby comprising a pair of outer walls which are positioned on the two sides of the two or more recesses and one or more middle walls positioned between the two or more recesses, and
the middle wall comprises an apex part located at a position lower than the apex part of each of the pair of outer walls and is thinner than each of the pair of outer walls at the same height;
a first electrode which is arranged over the two or more recesses on the predetermined surface, and
a pair of second electrodes which are arranged on a pair of side surfaces of the arm part which are positioned on the two sides of the width direction relative to the predetermined surface and intersect with the predetermined surface.
2. The piezoelectric vibration element according to claim 1 , wherein the pair of outer walls comprise apex parts located at heights equal to each other and have equal thicknesses at the same heights.
3. The piezoelectric vibration element according to claim 1 , wherein, the arm part is provided with two or more sets of recesses each comprising two or more recesses, in its extension direction, thereby comprising one or more transverse walls positioned among the two or more sets of recesses, and
the apex part of transverse wall is located at a position higher than the apex part of the middle wall.
4. A piezoelectric vibration device comprising:
a piezoelectric vibration element according to claim 1 and
a mounting base on which the piezoelectric vibration element is mounted.