Fluidic pick-up head for small semiconductor devices
A method and system for manufacturing a device by picking and placing semiconductor devices from a carrier substrate to a target substrate using fluidic material as a transfer medium. The method may include releasing a first amount of fluidic material from a tip of a pick-up head to form a fluidic membrane on the tip, and bringing the fluidic membrane on the tip of the pick-up head in contact with a semiconductor device on a carrier substrate to attach the semiconductor device to the fluidic membrane. The method can further include releasing a second amount of the fluidic material from the tip of the pick-up head to separate the semiconductor device from the pick-up head and place the semiconductor device on a target substrate.
1. A method, comprising:
releasing a first amount of fluidic material from a tip of a pick-up head to form a fluidic membrane on the tip, the fluidic material being a liquid;
bringing the fluidic membrane on the tip of the pick-up head in contact with a semiconductor device on a carrier substrate to attach the semiconductor device to the fluidic membrane;
removing the semiconductor device from the carrier substrate by lifting the pick-up head with the semiconductor device attached to the fluidic membrane on the tip of the pick-up head;
aligning, with the pick-up head, the semiconductor device with a location on a target substrate; and
releasing a second amount of the fluidic material from the tip of the pick-up head to separate the semiconductor device from the pick-up head.
2. The method of claim 1 , wherein:
the carrier substrate is a carrier tape; and
the method further includes:
fabricating a plurality of semiconductor devices including the semiconductor device on a native substrate;
transferring the plurality of semiconductor devices to the carrier tape;
singulating the plurality of semiconductor devices on the carrier tape; and
spatially separating the plurality of semiconductor devices by expanding the carrier tape.
3. The method of claim 2 , wherein the plurality of semiconductor devices are singulated by a laser beam directed through the carrier tape, the laser beam heating the carrier tape to reduce an adhesion force between the semiconductor device and the carrier tape.
4. The method of claim 2 , wherein:
the target substrate is a display substrate; and
the semiconductor device is a light emitting diode (LED).
5. The method of claim 1 , wherein:
the target substrate is an intermediate carrier substrate; and
the method further includes transferring the semiconductor device on the intermediate carrier substrate to a display substrate using a direct bonding process.
6. The method of claim 1 , wherein releasing the second amount of the fluidic material from the tip of the pick-up head causes the first and second amounts of the fluidic material to cover at least a portion of the semiconductor device.
7. The method of claim 6 , wherein:
the semiconductor device is a LED configured to emit first color light; and
the fluidic material is a color converting material that forms a color conversion layer on the semiconductor device to convert the first color light into a second color light.
8. The method of claim 6 , wherein the first and second amounts of the fluidic form a protective layer that encapsulates the semiconductor device.
9. The method of claim 6 , wherein the first and second amounts of the fluidic material include conductive material that forms an electrical connection between the semiconductor device and the target substrate.
10. The method of claim 6 , further comprising evaporating the first and second amounts of the fluidic material covering the at least a portion of the semiconductor device on the target substrate to remove the fluidic material from the semiconductor device.
11. The method of claim 1 , further comprising:
selecting a subset of tips from an array of tips including the tip to release first amounts of the fluidic material;
releasing the first amounts of the fluidic material from the subset of tips to form a fluidic membrane on each of the subset of tips;
bringing the fluidic membranes on the subset of tips in contact with a subset of semiconductor devices to attach the subset of semiconductor devices to the fluidic membrane;
aligning, with the array of tips, the subset of semiconductor devices with a plurality of locations on the target substrate; and
releasing second amounts of the fluidic material from the subset of tips to separate the plurality of semiconductor devices from the plurality of tips and place the plurality of semiconductor devices at the plurality of locations on the target substrate.
12. The method of claim 11 , further comprising, prior to bringing the fluidic membranes on the subset of tips in contact with the subset of semiconductor devices, aligning the subset of tips with the subset of semiconductor devices on the carrier substrate by expanding the carrier substrate to spatially separate the semiconductors devices.
13. A display panel fabricated by a method, comprising:
releasing a first amount of fluidic material from a tip of a pick-up head to form a fluidic membrane on the tip, the fluidic material being a liquid;
bringing the fluidic membrane on the tip of the pick-up head in contact with a light emitting diode (LED) on a carrier substrate to attach the LED to the fluidic membrane;
removing the LED from the carrier substrate by lifting the pick-up head with the LED attached to the fluidic membrane on the tip of the pick-up head;
aligning, with the pick-up head, the LED with a location on a target substrate; and
releasing a second amount of the fluidic material from the tip of the pick-up head to separate the LED from the pick-up head and place the LED at the location on the target substrate.
14. The display panel of claim 13 , wherein:
the target substrate is a display substrate of the display panel; or
the target substrate is an intermediary carrier substrate, the LED is transferred to the display substrate from the intermediary carrier substrate using a direct bonding process.
15. The display panel of claim 13 , wherein:
the carrier substrate is a carrier tape; and
the method further includes:
fabricating a plurality of LEDs including the LED on a native substrate;
transferring the plurality of LEDs to the carrier tape;
singulating the plurality of LEDs on the carrier tape; and
spatially separating the plurality of LEDs by expanding the carrier tape.
16. The display panel of claim 15 , wherein the plurality of LEDs are singulated by a laser beam directed through the carrier tape, the laser beam heating the carrier tape to reduce an adhesion force between the LED and the carrier tape.
17. The display panel of claim 13 , wherein
the LED is configured to emit first color light; and
the first and second amounts of the fluidic material is a color converting material that forms a color conversion layer on the LED to convert the first color light into a second color light.
18. The display panel of claim 13 , wherein the first and second amounts of the fluidic material include conductive material that forms an electrical connection between the LED and the target substrate.
19. The display panel of claim 13 , wherein the method further includes evaporating the first and second amounts of the fluidic material covering at least a portion of the LED on the target substrate to remove the fluidic material from the LED.