IP Library › Granted Patent US 10,453,723
Granted Patent B2
US 10,453,723 · App. 15/523,852 · Granted Oct 22, 2019

Gas purge filter

Inventors: Nobuyuki Kasama (Tokyo, JP); Tsuyoshi Nagashima (Tokyo, JP)
Assignee: Miraial Co., Ltd.
H01L21/67393B01D46/0005B01D46/10B01D46/4272B01D46/526F16K15/026F16K15/028B01D2279/35B01D2279/45
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Quick Facts
Patent No.
US 10,453,723
App. No.
15/523,852
Granted
Oct 22, 2019
Kind
B2
Abstract

Disclosed is a gas purge filter used in a housing container provided with a container main body and a lid body. The gas purge filter has a filter housing having a ventilation space where gas outside the housing container and gas of a housing space can be ventilated, and a pad formed outside the housing space of the filter housing to cover an outer peripheral face of a nozzle portion that forms a part of the ventilation space. The pad is formed of an elastic body.

Claims (12)

1. A gas purge filter in a housing container internally provided with a housing space formed by a container main body having a container main body opening portion in one end portion and a lid body that can be removably attached to the container main body opening portion and can close the container main body opening portion, the gas purge filter being installed in an access opening that can allow an external space of the housing container formed in at least one of the container main body or the lid body and the housing space to communicate with each other, the gas purge filter comprising:

a filter housing having a ventilation space where gas outside the housing container and gas of the housing space can be ventilated;

a pad formed outside a housing space of the filter housing to cover an outer peripheral face of a nozzle portion that forms a part of the ventilation space; and

a gas purge filter leading-end portion having a nozzle tip end portion formed in a tip end portion of the nozzle portion in a housing-space outward direction; and a pad outer-leading-end portion formed in a leading end portion of the pad in the housing-space outward direction,

wherein the filter housing is formed of thermoplastic resin,

the pad is formed of an elastic body,

when a purge port of a gas purge device for purging an internal gas of the housing container abuts the gas purge filter leading-end portion to perform a gas purge operation, the nozzle tip end portion is placed in the same position as that of the pad outer-leading-end portion abutting the gas purge filter leading-end portion or protrudes in the housing-space outward direction,

before the purge port abuts the gas purge filter leading-end portion, the pad outer-leading-end portion is placed in the same position as that of the nozzle tip end portion or protrudes in the housing-space outward direction.

2. The gas purge filter according to claim 1 , wherein, before the purge port abuts the gas purge filter leading-end portion,

the nozzle tip end portion protrudes in the housing-space outward direction from the position of the pad outer-leading-end portion.

3. The gas purge filter according to claim 1 , wherein an inner diameter of the pad outer-leading-end portion in a single body state of the pad is smaller than an outer diameter of the nozzle tip end portion.

4. The gas purge filter according to claim 1 , wherein a check valve mechanism for restricting a flow direction of the gas in a certain direction is provided in the ventilation space of the filter housing.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 4, 2017
From: KASAMA, NOBUYUKI; NAGASHIMA, TSUYOSHI
To: MIRAIAL CO., LTD.
Reel/Frame 042242/0172 →
Priority Claims (1)
JP 2014-229874 · Nov 12, 2014 · national
Continuity (1)
Related Publication 20180308733A1 · Oct 25, 2018