Substrate transfer mechanisms
In one embodiment, a substrate support assembly includes a susceptor for supporting a substrate, and a supporting transfer mechanism coupled to the susceptor, the supporting transfer mechanism having a surface for supporting a peripheral edge of the substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor.
1. A substrate support assembly, comprising:
a susceptor for supporting a substrate, the susceptor having a recessed surface with one or more ridges extending therefrom;
a supporting transfer mechanism coupled to the susceptor, the supporting transfer mechanism having a surface for supporting a peripheral edge of the substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor;
a plurality of lift pins for supporting the susceptor; and
a plurality of support pins positioned radially outward of the plurality of lift pins.
2. The substrate support assembly of claim 1 , wherein the supporting transfer mechanism comprises a ring.
3. The substrate support assembly of claim 2 , wherein the ring has a first gap.
4. The substrate support assembly of claim 3 , wherein the ring has a second gap opposing the first gap.
5. The substrate support assembly of claim 3 , wherein the recessed surface is sized to receive the ring.
6. The substrate support assembly of claim 1 , wherein the supporting transfer mechanism comprises a plurality of ring segments.
7. The substrate support assembly of claim 6 , wherein the susceptor comprises a recessed portion sized to receive the ring segments.
8. The substrate support assembly of claim 1 , wherein each of the plurality of lift pins are independently movable relative to the plurality of support pins.
9. The substrate support assembly of claim 8 , wherein each of the support pins comprises a flared head disposed on a shaft.
10. The substrate support assembly of claim 9 , wherein the flared head comprises a sloped surface.
11. A substrate support assembly, comprising:
a susceptor having a recessed surface with one or more ridges extending therefrom;
a supporting transfer mechanism having a surface for supporting a substrate, the supporting transfer mechanism being movable relative to an upper surface of the susceptor and adapted to nest within the recessed surface of the susceptor;
a plurality of lift pins for supporting the susceptor; and
a plurality of support pins positioned radially outward of the plurality of lift pins.
12. The substrate support assembly of claim 11 , wherein the supporting transfer mechanism comprises a detachable support plate.
13. The substrate support assembly of claim 11 , wherein each of the one or more ridges comprise indexing features that interface with the supporting transfer mechanism.
14. The substrate support assembly of claim 11 , wherein the supporting transfer mechanism comprises a ring.
15. The substrate support assembly of claim 14 , wherein the ring has a first gap.
16. The substrate support assembly of claim 15 , wherein the ring has a second gap opposing the first gap.
17. The substrate support assembly of claim 11 , wherein the supporting transfer mechanism comprises a plurality of ring segments.
18. A substrate support assembly, comprising:
a susceptor having a recessed surface with one or more ridges extending therefrom;
a ring having a surface for supporting a substrate and sized to nest within the recessed surface, the ring being movable relative to an upper surface of the susceptor;
a plurality of lift pins for supporting the susceptor; and
a plurality of support pins positioned radially outward of the plurality of lift pins.
19. The substrate support assembly of claim 18 , wherein the ring has a first gap.
20. The substrate support assembly of claim 19 , wherein the ring has a second gap opposing the first gap.