IP Library › Granted Patent US 10,454,022
Granted Patent B2
US 10,454,022 · App. 15/716,094 · Granted Oct 22, 2019

Magnetoresistance effect element

Inventor: Tomoyuki Sasaki (Tokyo, JP)
Assignee: TDK CORPORATION
H01L43/02G11C11/161H01L43/08H01L43/10H01L27/222
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Quick Facts
Patent No.
US 10,454,022
App. No.
15/716,094
Granted
Oct 22, 2019
Kind
B2
Abstract

A magnetoresistance effect element has favorable symmetry of an MR ratio even if the sign of a bias voltage is different, which is capable of reversing magnetization to a current, which has a high MR ratio. A magnetoresistance effect element includes a laminate in which an underlayer, a first ferromagnetic metal layer, a tunnel barrier layer, and a second ferromagnetic metal layer are laminated in that order, wherein the underlayer is made of one or more selected from a group containing of TiN, VN, NbN, and TaN, or mixed crystals thereof, and wherein the tunnel barrier layer is made of a compound having a spinel structure and represented by the following composition formula (1). (1): A x Ga 2 O y where A is a non-magnetic divalent cation and represents a cation of at least one element selected from the group consisting of magnesium, zinc, and cadmium, x is a number that satisfies 0<x≤2, and y is a number that satisfies 0<y≤4.

Claims (53)

1. A magnetoresistance effect element comprising a laminate in which:

an underlayer;

a first ferromagnetic metal layer;

a tunnel barrier layer; and

a second ferromagnetic metal layer are laminated in this order,

wherein:

the underlayer is made of one or more selected from a group consisting of TiN, VN, NbN, TaN, and a mixed crystal thereof,

the tunnel barrier layer is made of a compound having a spinel structure and represented by a composition formula (1) below,

A x Ga 2 O y   (1)

where:

A is a non-magnetic divalent cation and represents a cation of at least one element selected from a group consisting of magnesium, zinc, and cadmium,

x is a number that satisfies 0<x≤2, and

y is a number that satisfies 0<y≤4, and

the tunnel barrier layer comprises:

a lattice-matched portion that lattice-matches with both of the first ferromagnetic metal layer and the second ferromagnetic metal layer; and

a non-lattice-matched portion that is free of a lattice-matching with at least one of the first ferromagnetic metal layer and the second ferromagnetic metal layer.

2. The magnetoresistance effect element according to claim 1 , wherein

A in the composition formula (1) is a cation of at least one element selected from a group consisting of magnesium and zinc, and

the underlayer is made of one or more selected from a group consisting of TiN, VN, TaN, and mixed crystals thereof.

3. A magnetoresistance effect element comprising a laminate in which:

an underlayer made of NbN;

a first ferromagnetic metal layer;

a tunnel barrier layer; and

a second ferromagnetic metal layer are laminated in this order,

wherein the tunnel barrier layer is made of a compound having a spinel structure and represented by a composition formula (1) below,

A x Ga 2 O y   (1)

where:

A is a cadmium ion, and

x is a number that satisfies 0<x≤2, and

y is a number that satisfies 0<y≤4.

4. The magnetoresistance effect element according to claim 3 , wherein the tunnel barrier layer comprises:

a lattice-matched portion that lattice-matches with both of the first ferromagnetic metal layer and the second ferromagnetic metal layer; and

a non-lattice-matched portion that is free of a lattice-matching with at least one of the first ferromagnetic metal layer and the second ferromagnetic metal layer.

5. The magnetoresistance effect element according to claim 1 ,

wherein the tunnel barrier layer has a spinel structure in which an atomic arrangement is disordered.

6. The magnetoresistance effect element according to claim 1 ,

wherein a crystal lattice of either or both of the first ferromagnetic metal layer and the second ferromagnetic metal layer matches the tunnel barrier layer in a cubic-on-cubic structure.

7. The magnetoresistance effect element according to claim 2 ,

wherein a crystal lattice of either or both of the first ferromagnetic metal layer and the second ferromagnetic metal layer matches the tunnel barrier layer in a cubic-on-cubic structure.

8. The magnetoresistance effect element according to claim 3 ,

wherein a crystal lattice of either or both of the first ferromagnetic metal layer and the second ferromagnetic metal layer matches the tunnel barrier layer in a cubic-on-cubic structure.

9. The magnetoresistance effect element according to claim 4 ,

wherein a crystal lattice of either or both of the first ferromagnetic metal layer and the second ferromagnetic metal layer matches the tunnel barrier layer in a cubic-on-cubic structure.

10. The magnetoresistance effect element according to claim 5 ,

wherein a crystal lattice of either or both of the first ferromagnetic metal layer and the second ferromagnetic metal layer matches the tunnel barrier layer in a cubic-on-cubic structure.

11. The magnetoresistance effect element according to claim 1 ,

wherein at least one of the first ferromagnetic metal layer and the second ferromagnetic metal layer has magnetic anisotropy perpendicular to a lamination direction.

12. The magnetoresistance effect element according to claim 2 ,

wherein at least one of the first ferromagnetic metal layer and the second ferromagnetic metal layer has magnetic anisotropy perpendicular to a lamination direction.

13. The magnetoresistance effect element according to claim 3 ,

wherein at least one of the first ferromagnetic metal layer and the second ferromagnetic metal layer has magnetic anisotropy perpendicular to a lamination direction.

14. The magnetoresistance effect element according to claim 1 ,

wherein at least one of the first ferromagnetic metal layer and the second ferromagnetic metal layer is Co 2 Mn 1-a Fe a Al b Si 1-b (0≤a≤1, 0≤b≤1).

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 26, 2017
From: SASAKI, TOMOYUKI
To: TDK CORPORATION
Reel/Frame 043705/0584 →
Priority Claims (1)
JP 2016-192009 · Sep 29, 2016 · national
Continuity (1)
Related Publication 20180090670A1 · Mar 29, 2018