Acoustic resonator structure having an electrode with a cantilevered portion
View Patent ↗An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A piezoelectric layer is disposed between the first and second electrodes. A bridge disposed adjacent to one of the sides of the second electrode.
1. An acoustic resonator, comprising:
a first electrode;
a second electrode comprising a plurality of sides, wherein at least one of the sides comprises a cantilevered portion, wherein the second electrode comprises a first surface disposed substantially at a first height, and the cantilevered portion comprises a second surface disposed substantially at a second height, which is higher than the first height;
a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein a first gap exists between the cantilevered portion and the piezoelectric layer, and the first gap is substantially filled with a low acoustic impedance material; and
a bridge comprising a second gap, which exists in a region between the second electrode and the piezoelectric layer, wherein the second gap is substantially filled with the low acoustic impedance material, and is disposed adjacent to one of the sides of the second electrode.
2. The acoustic resonator as claimed in claim 1 , further comprising a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer, wherein a contacting overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator, and the bridge is disposed adjacent to the active area of the acoustic resonator.
3. The acoustic resonator as claimed in claim 2 , wherein the cantilevered portion of the second electrode extends beyond a termination of the active area.
4. The acoustic resonator as claimed in claim 1 , wherein all but one of the plurality of sides of the second electrode comprises the cantilevered portion.
5. The acoustic resonator as claimed in claim 4 , further comprising an electrical connection to the one of the plurality of sides of the second electrode that does not comprise the cantilevered portion.
6. An acoustic resonator, comprising:
a first electrode;
a second electrode comprising a plurality of sides, wherein at least one of the sides comprises a cantilevered portion, wherein the second electrode comprises a first surface disposed substantially at a first height, and the cantilevered portion comprises a second surface disposed substantially at a second height, which is higher than the first height;
a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein a first gap exists between the cantilevered portion and the piezoelectric layer, and the first gap is substantially filled with a low acoustic impedance material;
a bridge comprising a second gap in a region between the second electrode and the piezoelectric layer, wherein the second gap is substantially filled with the low acoustic impedance material, and is disposed adjacent to one of the sides of the second electrode;
a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer, wherein a contacting overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator, and the bridge is disposed adjacent to the active area of the acoustic resonator; and
a frame element.
7. The acoustic resonator as claimed in claim 6 , wherein the frame element is a recessed frame element.
8. The acoustic resonator claimed in claim 6 , wherein the frame element comprises a raised frame element.
9. The acoustic resonator claimed in claim 6 , wherein the low acoustic impedance material is one of carbon (C) doped silicon dioxide (SiO 2 ), SiLK™ dielectric resin, or benzocyclobutene (BCB).
10. The acoustic resonator as claimed in claim 6 , further comprising:
a reflective element beneath the first electrode, the second electrode and the piezoelectric layer, wherein a contacting overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator, and the bridge is disposed adjacent to the active area of the acoustic resonator.
11. The acoustic resonator as claimed in claim 10 , wherein the cantilevered portion of the second electrode extends beyond a termination of the active area.
12. The acoustic resonator as claimed in claim 6 , wherein all but one of the plurality of sides of the second electrode comprises the cantilevered portion.
13. The acoustic resonator as claimed in claim 12 , further comprising an electrical connection to the one of the plurality of sides of the second electrode that does not comprise the cantilevered portion.
14. An acoustic resonator, comprising:
a first electrode;
a second electrode comprising a plurality of sides, wherein at least one of the sides comprises a cantilevered portion, wherein the second electrode comprises a first surface disposed substantially at a first height, and the cantilevered portion comprises a second surface disposed substantially at a second height, which is higher than the first height;
a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein a first gap exists between the cantilevered portion and the piezoelectric layer, and the first gap is substantially filled with a low acoustic impedance material; and
a bridge comprising a second gap in a region between the second electrode and the piezoelectric layer, wherein the second gap is substantially filled with the low acoustic impedance material, and is disposed adjacent to one of the sides of the second electrode,
wherein the low acoustic impedance material is one of carbon (C) doped silicon dioxide (SiO 2 ), SiLK™ dielectric resin, or benzocyclobutene (BCB).
15. The acoustic resonator as claimed in claim 14 , further comprising:
a reflective element beneath the first electrode, the second electrode and the piezoelectric layer, wherein a contacting overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer comprises an active area of the acoustic resonator, and the bridge is disposed adjacent to the active area of the acoustic resonator.
16. The acoustic resonator as claimed in claim 15 , wherein the cantilevered portion of the second electrode extends beyond a termination of the active area.
17. The acoustic resonator as claimed in claim 14 , further comprising a recessed frame element.
18. The acoustic resonator claimed in claim 14 , further comprising a raised frame element.
19. The acoustic resonator as claimed in claim 14 , wherein all but one of the plurality of sides of the second electrode comprises the cantilevered portion.
20. The acoustic resonator as claimed in claim 19 , further comprising an electrical connection to the one of the plurality of sides of the second electrode that does not comprise the cantilevered portion.