Piezoelectric thin film resonator, filter, and duplexer
A piezoelectric thin film resonator includes: an acoustic reflection layer including an air gap or an acoustic mirror; lower and upper electrodes facing each other in a stacking direction, at least a part of each of the lower and upper electrodes being located on or above the acoustic reflection layer; a piezoelectric film sandwiched between the lower and upper electrodes and including lower and upper piezoelectric films, at least a part of an end face of the piezoelectric film in a film thickness direction being located between outer outlines of the resonance region and the acoustic reflection layer in at least a part of a region surrounding a resonance region; and an insertion film inserted between the lower and upper piezoelectric films, located in at least a part of an outer peripheral region within the resonance region, and not located in a center region of the resonance region.
1. A piezoelectric thin film resonator comprising:
a substrate;
an acoustic reflection layer that includes an air gap, or an acoustic mirror in which at least two types of layers with different acoustic characteristics are stacked;
a lower electrode and an upper electrode that face each other in a stacking direction, at least a part of the lower electrode and at least a part of the upper electrode being located on or above the acoustic reflection layer;
a piezoelectric film that is sandwiched between the lower electrode and the upper electrode and includes a lower piezoelectric film and an upper piezoelectric film, an end face of the upper piezoelectric film being located further out than an outer outline of a resonance region, in which the lower electrode and the upper electrode face each other across the piezoelectric film, and further in than an outer outline of the acoustic reflection layer in at least a part of a region surrounding the resonance region, the outer outline of the acoustic reflection layer being located further out than the outer outline of the resonance region; and
an insertion film that is inserted between the lower piezoelectric film and the upper piezoelectric film, is located in at least a part of an outer peripheral region within the resonance region, and is not located in a center region of the resonance region.
2. The piezoelectric thin film resonator according to claim 1 , wherein
in the at least a part of the region surrounding the resonance region, an end face of the lower piezoelectric film is located further out than the end face of the upper piezoelectric film and further in than the outer outline of the acoustic reflection layer.
3. The piezoelectric thin film resonator according to claim 2 , wherein
in the at least a part of the region surrounding the resonance region, an end face of the insertion film substantially coincides with the end face of the lower piezoelectric film.
4. A filter comprising
the piezoelectric thin film resonator according to claim 1 .
5. A duplexer comprising
a filter including the piezoelectric thin film resonator according to claim 1 .
6. The piezoelectric thin film resonator according to claim 1 , further comprising:
an additional film that is located on the upper piezoelectric film, further out than the outer outline of the resonance region, and away from the upper electrode in the at least a part of the region surrounding the resonance region.
7. The piezoelectric thin film resonator according to claim 1 , wherein
in the at least a part of the region surrounding the resonance region, an end face of the lower piezoelectric film is located further out than the end face of the upper piezoelectric film.
8. The piezoelectric thin film resonator according to claim 1 , wherein
an acoustic impedance of the insertion film is less than an acoustic impedance of the piezoelectric film.
9. The piezoelectric thin film resonator according to claim 1 , wherein
the acoustic reflection layer includes an air space.
10. The piezoelectric thin film resonator according to claim 1 , wherein
the acoustic reflection layer includes the acoustic mirror that reflects an acoustic wave propagating through the piezoelectric film.
11. The piezoelectric thin film resonator according to claim 1 , wherein
the acoustic reflection layer includes the acoustic mirror, and
one of the at least two types of layers of the acoustic mirror is the substrate.
12. A piezoelectric thin film resonator comprising:
a substrate;
an acoustic reflection layer that includes an air gap, or an acoustic mirror in which at least two types of layers with different acoustic characteristics are stacked;
a lower electrode and an upper electrode that face each other in a stacking direction, at least a part of the lower electrode and at least a part of the upper electrode being located on or above the acoustic reflection layer;
a piezoelectric film that is sandwiched between the lower electrode and the upper electrode and includes a lower piezoelectric film and an upper piezoelectric film, an end face of the upper piezoelectric film being located further out than an outer outline of a resonance region, in which the lower electrode and the upper electrode face each other across the piezoelectric film, and further in than an outer outline of the acoustic reflection layer, at the outer outline of the resonance region, or at the outer outline of the acoustic reflection layer in at least a part of a region surrounding the resonance region, the outer outline of the acoustic reflection layer being located further out than the outer outline of the resonance region and
an insertion film that is inserted between the lower piezoelectric film and the upper piezoelectric film, is located in at least a part of an outer peripheral region within the resonance region, and is not located in a center region of the resonance region,
wherein
in the at least a part of the region surrounding the resonance region, end faces of the upper piezoelectric film, the insertion film, and the lower piezoelectric film substantially coincide with each other.
13. A filter comprising the piezoelectric thin film resonator according to claim 12 .
14. A duplexer comprising a filter including the piezoelectric thin film resonator according to claim 12 .