MOS devices having epitaxy regions with reduced facets
An integrated circuit structure includes a gate stack over a semiconductor substrate, and an opening extending into the semiconductor substrate, wherein the opening is adjacent to the gate stack. A first silicon germanium region is disposed in the opening, wherein the first silicon germanium region has a first germanium percentage. A second silicon germanium region is over the first silicon germanium region. The second silicon germanium region comprises a portion in the opening. The second silicon germanium region has a second germanium percentage greater than the first germanium percentage. A silicon cap substantially free from germanium is over the second silicon germanium region.
1. A semiconductor device comprising:
a semiconductor substrate;
a gate structure;
a source/drain region adjacent the gate structure, the source/drain region comprising:
a first germanium comprising region;
a capping layer over the first germanium comprising region, the capping layer having a lower germanium percentage than the first germanium comprising region; and
a silicide extending through the capping layer, wherein a germanium percentage at a first point in the silicide is greater than a silicon percentage at the first point in the silicide.
2. The semiconductor device of claim 1 , wherein a line extends from a second point outside of the silicide to the first point, wherein the line is parallel to a major surface of the semiconductor substrate, wherein a germanium percentage at the second point is lower than a silicon percentage at the second point.
3. The semiconductor device of claim 1 , wherein the silicide extends higher than the first point in the silicide.
4. The semiconductor device of claim 1 , wherein the source/drain region further comprises a second germanium comprising region under the first germanium comprising region, wherein the second germanium comprising region has a lower germanium percentage than the first germanium comprising region.
5. The semiconductor device of claim 4 , wherein a germanium concentration of the source/drain region gradually increases from a bottom of the second germanium comprising region into the first germanium comprising region.
6. The semiconductor device of claim 4 , wherein a germanium percentage of the second germanium comprising region at an interface between the second germanium comprising region and the semiconductor substrate is at least 10 percent, and wherein a germanium percentage of the first germanium comprising region at an interface between the first germanium comprising region and the capping layer is at least 30 percent.
7. The semiconductor device of claim 1 , wherein at least a topmost surface of the capping layer is free of germanium.
8. The semiconductor device of claim 1 , wherein at least a lower portion of the capping layer comprises germanium.
9. A semiconductor device comprising:
a semiconductor substrate;
a gate stack at a top surface of the semiconductor substrate;
a silicon germanium region at extending into the semiconductor substrate;
a capping layer over the silicon germanium region, wherein the capping layer has a lower germanium percentage than the silicon germanium region;
a silicide extending from above a top surface of the capping layer into the silicon germanium region;
an interlayer dielectric over the capping layer and extending along sidewalls of the gate stack; and
a contact extending through the interlayer dielectric to the silicide, wherein a germanium percentage of the silicide is greater than a silicon percentage of the silicide in a region of the silicide below a bottom surface of the contact.
10. The semiconductor device of claim 9 , wherein the germanium percentage of the silicide is greater than a germanium percentage of the capping layer.
11. The semiconductor device of claim 9 , wherein the bottom surface of the contact is above a bottom surface of the capping layer.
12. The semiconductor device of claim 9 , wherein the silicide extends partially along side surfaces of the contact.
13. The semiconductor device of claim 9 , wherein a germanium percentage of the silicon germanium region increases in a direction towards the capping layer.
14. The semiconductor device of claim 9 , wherein the capping layer comprises germanium.
15. The semiconductor device of claim 9 , wherein the silicon germanium region extends above the top surface of the semiconductor substrate.
16. A semiconductor device comprising:
a semiconductor substrate;
a gate stack on the semiconductor substrate;
an epitaxial region adjacent the gate stack;
a capping layer over the epitaxial region, wherein the epitaxial region comprises a greater concentration of germanium than the capping layer;
a silicide disposed in the capping layer and the epitaxial region;
a dielectric layer over the capping layer and around the gate stack; and
a contact electrically connected to the silicide, wherein the silicide extends above a top surface of the capping layer and along a side surface of the contact.
17. The semiconductor device of claim 16 , wherein the contact is electrically connected to the silicide at a point below a top surface of the capping layer.
18. The semiconductor device of claim 16 , wherein the silicide extends into the dielectric layer.
19. The semiconductor device of claim 16 , wherein the silicide has a greater concentration of germanium than the capping layer.
20. The semiconductor device of claim 16 , wherein a portion of the capping layer is disposed between the side surface of the contact and a side surface of the silicide.