High efficiency vapor transport sublimation source using baffles coated with source material
A source of material for use in a deposition system includes one or more baffles or equivalent structures within the source. The baffles provide for increased concentration of material entrained in a carrier gas that is passed through and emitted by the source.
1. A material source for a deposition system, the material source comprising:
a cavity having a gas inlet port and a gas outlet port distinct from the gas inlet port;
a plurality of baffles disposed within the cavity and physically positioned within the cavity to prevent a direct gas flow between the gas inlet port and the gas outlet port; and
a coating of a material to be entrained in an outflow of gas from the gas outlet port disposed on at least one baffle of the plurality of baffles;
wherein the coating has a different thickness depending upon a position within the cavity of the at least one baffle on which the coating is deposited.
2. The material source of claim 1 , wherein the coating is thicker on a portion of the at least one baffle at a position closer to the gas inlet port than to the gas outlet port.
3. The material source of claim 1 , wherein at least one of the plurality of baffles is removably disposed within the cavity.
4. The material source of claim 1 , wherein at least one of the plurality of baffles is covered by a chemically inert film coating.
5. The material source of claim 1 , wherein a headspace available for gas flow over a transfer surface of at least one baffle of the plurality of baffles is not greater than 5 mm.
6. The material source of claim 5 , wherein the headspace over the at least one baffle is defined by the area between the at least one baffle and a neighboring baffle disposed adjacent to the at least one baffle.
7. The material source of claim 1 , wherein at least one of the plurality of baffles comprises a turbulence-inducing surface.
8. The material source of claim 1 , wherein the coating is disposed in a region between two baffles.
9. The material source of claim 8 , wherein spacing between adjacent baffles is variable along the flow path.
10. The material source of claim 9 , wherein baffles are spaced more densely closer to the outlet.
11. The material source of claim 10 , wherein the coating is disposed on a first surface of a first baffle of the plurality of baffles and a first surface of a second baffle of the plurality of baffles, and wherein each of a second surface of the first baffle and a second surface of the second baffle is uncoated by the coating.
12. The material source of claim 1 , further comprising a source of dilution gas flow in fluid communication with the gas outlet port.
13. A material source for a deposition system, the material source comprising:
a cavity having a gas inlet port and a gas outlet port distinct from the gas inlet port;
a plurality of baffles disposed within the cavity and physically positioned within the cavity to prevent a direct gas flow between the gas inlet port and the gas outlet port; and
a coating of a material to be entrained in an outflow of gas from the gas outlet port disposed on at least one baffle of the plurality of baffles;
wherein at least one of the plurality of baffles comprises a turbulence-inducing surface.
14. The material source of claim 13 , wherein at least one of the plurality of baffles is removably disposed within the cavity.
15. The material source of claim 13 , wherein at least one of the plurality of baffles is covered by a chemically inert film coating.
16. The material source of claim 13 , wherein a headspace available for gas flow over a transfer surface of at least one baffle of the plurality of baffles is not greater than 5 mm.
17. A material source for a deposition system, the material source comprising:
a cavity having a gas inlet port and a gas outlet port distinct from the gas inlet port;
a plurality of baffles disposed within the cavity and physically positioned within the cavity to prevent a direct gas flow between the gas inlet port and the gas outlet port; and
a coating of a material to be entrained in an outflow of gas from the gas outlet port disposed in at least one region between two baffles of the plurality of baffles;
wherein spacing between adjacent baffles is variable along the flow path.
18. The material source of claim 17 , wherein at least one of the plurality of baffles is covered by a chemically inert film coating.
19. The material source of claim 17 , wherein at least one of the plurality of baffles comprises a turbulence-inducing surface.
20. The material source of claim 19 , wherein spacing between adjacent baffles is variable along the flow path.
21. The material source of claim 20 , wherein baffles are spaced more densely closer to the outlet.
22. The material source of claim 17 , wherein the coating is disposed on a first surface of a first baffle of the plurality of baffles and a first surface of a second baffle of the plurality of baffles, and wherein each of a second surface of the first baffle and a second surface of the second baffle is uncoated by the coating.
23. A material source for a deposition system, the material source comprising:
a cavity having a gas inlet port and a gas outlet port distinct from the gas inlet port;
a plurality of baffles disposed within the cavity and physically positioned within the cavity to prevent a direct gas flow between the gas inlet port and the gas outlet port; and
a coating of a material to be entrained in an outflow of gas from the gas outlet port disposed on at least one baffle of the plurality of baffles;
wherein a headspace available for gas flow over a transfer surface of at least one baffle of the plurality of baffles is not greater than 5 mm.
24. The material source of claim 23 , wherein the headspace over the at least one baffle is defined by the area between the at least one baffle and a neighboring baffle disposed adjacent to the at least one baffle.
25. The material source of claim 23 , wherein at least one of the plurality of baffles comprises a turbulence-inducing surface.
26. The material source of claim 23 , wherein the coating is disposed in a region between two baffles.