Semiconductor device and electronic apparatus with metal-containing film layer at bonding surface thereof
There is provided a semiconductor device, including a semiconductor substrate, an interlayer insulating layer formed on the semiconductor substrate, a bonding electrode formed on a surface of the interlayer insulating layer, and a metal film which covers an entire surface of a bonding surface including the interlayer insulating layer and the bonding electrode.
1. A semiconductor device, comprising:
a semiconductor substrate;
an interlayer insulating layer formed on the semiconductor substrate;
a bonding electrode formed in the interlayer insulating layer such that the bonding electrode and the interlayer insulating layer form a planar surface including a first region corresponding to the bonding electrode and a second region corresponding to the interlayer insulating layer; and
a metal film layer which covers the planar surface,
wherein the metal film layer includes a material and is exposed to a heat treatment, and the heat treatment causes at least a part of the material that contacts the interlayer insulating layer to react with the interlayer insulating layer.
2. The semiconductor device according to claim 1 ,
wherein the material is a metal which becomes an insulator due to a reaction with the interlayer insulating layer.
3. The semiconductor device according to claim 1 ,
wherein the material includes at least one type selected from Ta or Ti.
4. A semiconductor device including a first semiconductor substrate and a second semiconductor substrate which are formed by laminating surfaces of bonding electrodes through metal films, the semiconductor device comprising:
the first semiconductor substrate;
a first interlayer insulating layer formed on the first semiconductor substrate;
a first bonding electrode formed in the first interlayer insulating layer such that the first bonding electrode and the first interlayer insulating layer form a first planar surface including a first region corresponding to the first bonding electrode and a second region corresponding to the first interlayer insulating layer;
the second semiconductor substrate bonded to the first semiconductor substrate;
a second interlayer insulating layer formed on the second semiconductor substrate;
a second bonding electrode formed in the second interlayer insulating layer such that the second bonding electrode and the second interlayer insulating layer form a second planar surface including a third region corresponding to the second bonding electrode and a fourth region corresponding to the second interlayer insulating layer;
a first metal film layer formed between the first planar surface and the second planar surface,
wherein the first metal film layer includes a first material that reacts with the first interlayer insulating layer in a case where the first material contacts the first interlayer insulating layer and is exposed to a heat treatment.
5. An electronic apparatus, comprising:
a semiconductor device which includes
a semiconductor substrate,
an interlayer insulating layer formed on the semiconductor substrate,
a bonding electrode formed in the interlayer insulating layer such that the bonding electrode and the interlayer insulating layer form a planar surface including a first region corresponding to the bonding electrode and a second region corresponding to the interlayer insulating layer, and
a metal film layer which covers the planar surface; and
a signal processing circuit configured to process an output signal of the semiconductor device,
wherein the metal film layer includes a material that reacts with the interlayer insulating layer in a case where the material contacts the interlayer insulating layer and is exposed to a heat treatment.
6. The semiconductor device according to claim 1 , further comprising a barrier surface layer between the interlayer insulating layer and the bonding electrode.
7. The semiconductor device according to claim 6 , wherein the barrier surface layer includes a material selected from the group consisting of Ta, Ti, Ru, TaN, and TiN.
8. The semiconductor device according to claim 1 , wherein the interlayer insulating layer includes an oxide, or a nitride layer and a metallic oxide.
9. The semiconductor device according to claim 1 , wherein the bonding electrode includes Cu.
10. The semiconductor device according to claim 1 , wherein a thickness of the metal film layer is equal to or less than 100 nm.
11. The semiconductor device according to claim 7 , wherein a thickness of the metal film layer is equal to or less than 20 nm.
12. The semiconductor device according to claim 4 , further comprising a barrier surface layer between the first interlayer insulating layer and the first bonding electrode.
13. The semiconductor device according to claim 4 , further comprising:
a second metal film layer formed between the first planar surface and the second planar surface,
wherein the second metal film layer includes a second material that reacts with the second interlayer insulating layer in a case where the second material contacts the second interlayer insulating layer and is exposed to the heat treatment.
14. The semiconductor device according to claim 13 , further comprising:
a first barrier surface layer between the first interlayer insulating layer and the first bonding electrode; and
a second barrier surface layer between the second interlayer insulating layer and the second bonding electrode.
15. The semiconductor device according to claim 4 , wherein the first interlayer insulating layer and/or the second interlayer insulating layer includes an oxide, or a nitride layer and a metallic oxide.
16. The semiconductor device according to claim 4 , wherein the first bonding electrode and/or the second bonding electrode includes Cu.
17. The semiconductor device according to claim 4 , wherein a thickness of the first metal film layer is equal to or less than 100 nm.
18. The semiconductor device according to claim 17 , wherein a thickness of the first metal film layer is equal to or less than 20 nm.
19. The semiconductor device according to claim 4 , wherein a thickness of a reaction product of the first metal film layer and the first interlayer insulating layer is equal to or more than 5 molecular layers.
20. An electronic apparatus comprising:
the semiconductor device according to claim 4 ; and
a signal processing circuit configured to process an output signal of the semiconductor device.