Slide component
In an embodiment, in a slide component, a negative pressure generation mechanism 12 that generates negative pressure by relative rotational sliding of a stationary-side seal ring 5 and a rotating-side seal ring 3 is provided on a sealing face of one of the stationary-side seal ring 5 and the rotating-side seal ring 3 , and at least the surface of the negative pressure generation mechanism 12 is covered by an adhesion-resistant material film 15 . With the configuration, deposition of precipitates on a negative pressure portion of a sealing face can be inhibited.
1. A slide component comprising an annular stationary-side seal ring fixed to a stationary side, and an annular rotating-side seal ring that rotates with a rotating shaft, the slide component causing opposed sealing faces of the stationary-side seal ring and the rotating-side seal ring to rotate relatively, thereby sealing a high-pressure fluid present on radially one side, as viewed in a radial direction, of the sliding sealing faces rotatable relative to each other, wherein:
a negative pressure generation mechanism that generates negative pressure by relative rotational sliding of the stationary-side seal ring and the rotating-side seal ring is provided on the sealing face of one of the stationary-side seal ring and the rotating-side seal ring;
a fluid circulation groove constituted by an inlet portion for entry of a sealed fluid thereinto from the high-pressure fluid side, an outlet portion for discharge of the sealed fluid therefrom to the high-pressure fluid side, and a connection portion circumferentially connecting the inlet portion and the outlet portion is provided on the sealing face of the one of the stationary-side seal ring and the rotating-side seal ring;
the sealing face having the negative pressure generation mechanism is provided with a film made of a material, other than titanium nitride (TiN), selected from the group consisting of diamond-like carbon (DLC), diamond, fluororesin (PTFE), fluorine, and a silicon resin as an adhesion-resistant material; and
a thickness of the adhesion-resistant material is smaller than a depth of the negative pressure generation mechanism.
2. The slide component according to claim 1 , wherein the negative pressure generation mechanism comprises a dimple formed in the sealing face.
3. The slide component according to claim 1 , wherein the negative pressure generation mechanism is formed in the sealing face, and comprises a pumping groove that discharges a fluid entering the sealing face to a high-pressure fluid side.
4. The slide component according to claim 1 , wherein the negative pressure generation mechanism is provided to be located on a low-pressure side of the sealing face, and comprises a negative pressure generation groove that communicates with a high-pressure fluid side and is separated from a low-pressure fluid side by a land portion.
5. The slide component according to claim 4 , wherein the negative pressure generation mechanism comprises a reverse Rayleigh step mechanism.
6. The slide component according to claim 4 , wherein the negative pressure generation mechanism comprises a reverse spiral groove.
7. The slide component according to claim 1 , wherein a thickness of the adhesion-resistant material is about 0.5 μm.