Electro-optical apparatus, manufacturing method thereof, and electronic device
There is provided an electro-optical apparatus including an element substrate that includes a display region in which a plurality of light-emitting elements are arranged, and a peripheral region in which a terminal is disposed. The light-emitting element has a structure in which a reflective electrode, an optical adjustment layer, a first electrode, a light-emitting layer, and a second electrode are laminated, and the first electrode is electrically connected to a contact electrode. The terminal has a structure in which a first terminal layer that is formed by a first conductive film which is the same as the reflective electrode, a second terminal layer that is formed by a second conductive film which is the same as the contact electrode, and a third terminal layer that is formed by a third conductive film which is the same as the first electrode are laminated.
1. An electro-optical apparatus comprising:
a substrate;
a first electrode;
a light-emitting layer disposed between the first electrode and the substrate;
an optical path adjustment layer disposed between the light-emitting layer and the substrate;
a reflective electrode disposed between the optical path adjustment layer and the substrate;
a second electrode disposed between the light-emitting layer and the optical path adjustment layer;
a pixel separation layer made from an insulation layer;
a terminal including a first terminal layer, a second terminal layer, and a third terminal layer,
wherein the first terminal layer and the reflective electrode are formed by a first conductive film,
wherein the second terminal layer and a contact electrode are formed by a second conductive film,
wherein the third terminal layer and the second electrode are formed by a third conductive film,
wherein the pixel separation layer has an opening which exposes a portion of the second electrode and covers a peripheral edge section of the second electrode, and
wherein the contact electrode is provided so as not to overlap the opening of the pixel separation layer in plan view.
2. The electro-optical apparatus according to claim 1 ,
wherein the third conductive film includes a transparent conductive material,
the second conductive film includes a conductive material with a higher conductivity than the third conductive film, and
the first conductive film includes a conductive material.
3. The electro-optical apparatus according to claim 2 ,
wherein the third conductive film includes indium tin oxide,
the second conductive film includes titanium nitride, and
the first conductive film includes aluminum and copper.
4. The electro-optical apparatus according to claim 1 ,
wherein the first electrode is electrically connected to the reflective electrode via the contact electrode, and
the reflective electrode is electrically connected to a transistor.
5. The electro-optical apparatus according to claim 1 ,
wherein the reflective electrode is configured by a portion of a power supply line,
a relay electrode which is electrically connected to a transistor is disposed inside an opening which is formed in the reflective electrode, and
the first electrode is electrically connected to the relay electrode via the contact electrode.
6. The electro-optical apparatus according to claim 1 , further comprising a protective layer disposed between the optical path adjustment layer and the reflective electrode.
7. The electro-optical apparatus according to claim 6 ,
wherein the protective layer has a contact hole, and
the contact electrode is electrically connected to the reflective electrode via the contact hole.
8. An electronic device comprising:
the electro-optical apparatus according to claim 1 .
9. An electronic device comprising:
the electro-optical apparatus according to claim 2 .
10. An electronic device comprising:
the electro-optical apparatus according to claim 3 .
11. An electronic device comprising:
the electro-optical apparatus according to claim 4 .
12. An electronic device comprising:
the electro-optical apparatus according to claim 5 .
13. An electronic device comprising:
the electro-optical apparatus according to claim 6 .
14. An electronic device comprising:
the electro-optical apparatus according to claim 7 .