Acoustic wave device and method of fabricating the same
A method of fabricating an acoustic wave device includes: forming a piezoelectric thin film resonator and a second lower electrode on a substrate, the piezoelectric thin film resonator having a resonance region in which a first lower electrode and a first upper electrode face each other across a piezoelectric film, the piezoelectric film and the first upper electrode are not formed on the second lower electrode outside the resonance region; forming a first dielectric film in the resonance region and a second dielectric film on the second lower electrode outside the resonance region at a same time, the first dielectric film and the second dielectric film being made of a material different from a material of the piezoelectric film; and forming a second upper electrode on the second dielectric film, the second upper electrode facing the second lower electrode.
1. An acoustic wave device comprising:
a piezoelectric thin film resonator including:
a piezoelectric film located on a substrate;
a first lower electrode and a first upper electrode sandwiching the piezoelectric film; and
a first dielectric film located in a resonance region in which the first lower electrode and the first upper electrode face each other across the piezoelectric film; and
a capacitor including:
a second dielectric film that is located on the substrate, is made of a same material as the first dielectric film, and has a film thickness approximately equal to a film thickness of the first dielectric film; and
a second lower electrode and a second upper electrode that does not sandwich the piezoelectric film and sandwich the second dielectric film.
2. The acoustic wave device according to claim 1 , wherein the first dielectric film is located on the first upper electrode in the resonance region.
3. The acoustic wave device according to claim 1 , wherein
a wiring line electrically coupled to the first upper electrode is located on the first upper electrode outside the resonance region, and
the second upper electrode is made of a same material as the wiring line and has a film thickness approximately equal to a film thickness of the wiring line.
4. The acoustic wave device according to claim 1 , wherein
a wiring line electrically coupled to the first upper electrode is located on the first upper electrode outside the resonance region,
the wiring line and the second upper electrode are continuously located, and
the first lower electrode and the second lower electrode are continuously located.
5. The acoustic wave device according to claim 1 , wherein
a wiring line electrically coupled to the first upper electrode is located on the first upper electrode outside the resonance region,
the wiring line and the second upper electrode are continuously located, and
the first dielectric film and the second dielectric film are continuously located.
6. The acoustic wave device according to claim 1 , wherein a film thickness of the second dielectric film is less than a film thickness of the piezoelectric film.
7. The acoustic wave device according to claim 1 , further comprising a filter including the piezoelectric thin film resonator and the capacitor.
8. The acoustic wave device according to claim 7 , further comprising a multiplexer including the filter.